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Diffusion Equipment Support

Get a turnkey engineering service for implant, furnace, RTP, bonding, cleans and support equipment.

From advanced ion implanters to high-temperature furnace systems, we’ve been installing, relocating and commissioning diffusion tools in fabs and cleanrooms globally for 35+ years.

Whether you want to install an AMAT 9500xR, contract field service support for a TEL Alpha 8se, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.

  • OEM-trained specialist engineers
  • 50+ diffusion tools supported
  • Worldwide support
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Diffusion

Partnerships

  • Infineon
  • Axcelis
  • Nexperia
  • Applied Materials
  • Intel
A stack of polished silicon wafers
We work with IES because we trust them. We know that when a critical situation occurs and we have a tool down they’ll support us, not just with parts but also by providing experienced engineers if we need them. It’s a complete solution.
Analog DevicesImplant Centre Manager,Analog Devices

Equipment We Support

Our highly skilled engineers support 50+ diffusion tools. Use the drop-downs below to explore the full list of equipment we specialise in working with.

  • Implant

    Full ion implanter support service by IES.

    • AMAT XR80 & 9500XR, 9500XR200
    • AMAT QUANTUM l, ll & lll
    • AMAT QUANTUM X, X+
    • Varian 160-10
    • Varian 350D
    • Varian e220/e500
    • Varian VIISta 80, 810, 900XP, HCP, Trident
    • Eaton NV 6200AV
    • Axcelis 8250
    • Axcelis GSD 80, 100 & 200E
    • Axcelis GSD HE & VHE
    • Axcelis Optima
    • Axcelis Purion M, H & XE
  • Furnace
    • Tempress Furnace
    • Gasonics VHP
    • TEL Alpha 8se
    • Kokusai Furnace
    • SVG Furnace
    • Tetreon 5000 Series Furnace
    • Carbolite Gero Furnace
    • TPS Blue M Oven
    • Trikon AVP Furnace
    • Yield Eng YES 3/5 Oven
  • Rapid Thermal Processing
    • IES RTP
    • Solaris RTP
    • Jiplec Jetfirst 200
    • Leybold 2800 RTP
  • Bonding
    • EVG501 Bonder
    • EVG805 Debonder
    • EVG Gemini
    • EVG 810LT Plasma activation
    • EVG 560 Bonder
  • Cleans
    • Steag Wet bench
    • EVG 301 Cleaner
    • Semitool SRD’s
    • Kemsafe / CSTI Wet Bench
    • Felcon Wet Bench
    • SEZ 200/201/203
    • Convac 2000/6000/8000/multipak
    • FSI – Tidal, Saturn, Mercury, Proteus
  • Support
    • PolyFlow - Tube Cleans
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Processes we support

  • Anneal
  • Deposition
  • Pre Diffusion Cleans
  • Bake Oven
BOOK A SITE VISIT

Our turnkey ion implanter relocation service

As part of our turnkey relocation service, we cover every part of your project in-house.

  • Comprehensive site surveys, method statements and risk assessments
  • Decontamination
  • Tool dismantling and de-installation
  • Shipping brackets/lockdown kit
  • Tool move-out
  • Export packing
  • Door-to-door freighting, including customs
  • Tool move-in
  • Assembly and start-up
  • Final tests
Relocate complex equipment with total confidence

Support services for diffusion tools

We provide a comprehensive range of support services to keep diffusion tools running at peak performance.

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Trusted by Microchip, Analog Devices, Nexperia and more

We've supported both manufacturers and end users to move, install and commission diffusion tools since 1991, and we have strong working relationships with multiple world-class manufacturers.

An IES engineer carrying out compliance testing on semiconductor equipment
“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”
Plessey Semiconductors- Chief Operating Officer, Plessey Semiconductors
View case study

Why IES?

IES engineers installing an ion implanter on a semiconductor fab floor
  • Proven track record

    We have over 35 years of experience working with diffusion tools in fabs and cleanrooms across the globe.

  • OEM trained engineers

    Many of our engineers have decades of experience working with prestigious OEMs.

  • Specialist skills matching

    We use our Skills Matrix to match you with the most qualified engineers for your equipment, processes and project.

  • Multi-disciplinary teams

    Many of our diffusion specialists are also trained in metrology, photolithography, thin film and more, making them adaptable to multi-tool environments.

  • Worldwide support

    Our global teams can support your project, wherever in the world you're based.

  • Compliance & quality assured

    We meet SEMI standards and OEM specifications in all installation, relocation, and maintenance work.

Additional areas supported

Speak with a diffusion equipment specialist

Request a callback from one of our team or book a site survey for your project.

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