Sub-Fab Equipment Support
Get a turnkey engineering service for chillers, scrubbers, pumps, chemical dispense units, and waste systems.
From vacuum pumps and cryo compressors to scrubbers, chillers and chemical dispense units, we’ve been installing, relocating and commissioning sub-fab equipment in cleanrooms globally for 35+ years.
Whether you want to install an Edwards abatement scrubber, bring in contract field service support for a Brookes CryoTorr pump, or relocate a full suite of SMC chillers and chemical dispense units, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- Wide range of sub-fab equipment supported
- Worldwide support
Sub-Fab Equipment Support
Get a turnkey engineering service for chillers, scrubbers, pumps, chemical dispense units, and waste systems.
From vacuum pumps and cryo compressors to scrubbers, chillers and chemical dispense units, we’ve been installing, relocating and commissioning sub-fab equipment in cleanrooms globally for 35+ years.
Whether you want to install an Edwards abatement scrubber, bring in contract field service support for a Brookes CryoTorr pump, or relocate a full suite of SMC chillers and chemical dispense units, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- Wide range of sub-fab equipment supported
- Worldwide support
Partnerships
Equipment We Support
Our highly skilled engineers support a wide range of sub-fab tools. Use the drop-downs below to explore the full list of equipment we specialise in working with.
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Chemical dispense units
- Air Liquide – CDUs
- IDI – CDUs
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Waste systems
- Axios slurry waste
Our turnkey sub-fab tool relocation service
As part of our turnkey relocation service, we cover every part of your project in-house.
- Comprehensive site surveys, method statements and risk assessments
- Decontamination
- Tool dismantling and de-installation
- Shipping brackets/lockdown kit
- Tool move-out
- Export packing
- Door-to-door freighting, including customs
- Tool move-in
- Assembly and start-up
- Final tests
Support services for sub-fab tools
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Field service support, including: emergency tool-down support, short- or long-term contract-based support, and bespoke training |
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Structural machine bases |
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Parts sourcing and provisioning
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Upgrades |
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Compliance testing, including: UKCA/CE marking, PUWER assessments, and EMF testing
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Why IES?
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Proven track record
We have over 35 years of experience working with sub-fab equipment in fabs and cleanrooms across the globe.
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OEM trained engineers
Many of our engineers have decades of experience working with prestigious OEM's.
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Specialist skills matching
We use our Skills Matrix to match you with the most qualified engineers for your equipment, processes and project.
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Multi-disciplinary teams
Many of our equipment specialists are also trained in metrology, diffusion, thin film, and more, making them adaptable to multi-tool environments.
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Worldwide support
Our global teams can support your project, wherever in the world you’re based.
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Compliance & quality assured
We meet SEMI standards and OEM specifications in all installation, relocation, and maintenance work.
Trusted by Microchip, Analog Devices, Nexperia and more
We've supported both manufacturers and end users to move, install and commission sub-fab equipment since 1991, and we have strong working relationships with multiple world-class manufacturers.
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“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”
- Chief Operating Officer, Plessey Semiconductors
Additional areas supported
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Photolithography |
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Diffusion |
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Etch |
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Thin Film |
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Backend |
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Metrology |
Speak with an equipment specialist
Request a callback from one of our team or book a site survey for your project.

