Metrology Equipment Support
Get a turnkey engineering service for detection, measurement and microscope equipment.
From particle detection systems to advanced SEM microscopes, we’ve been installing, relocating and commissioning metrology tools in fabs and cleanrooms globally for 35+ years.
Whether you want to install a KLA Surfscan system, contract field service support for a Leica microscope, or relocate a full suite of OptiProbe and NanoMetrics tools, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- Wide range of metrology tools supported
- Worldwide support
Metrology Equipment Support
Get a turnkey engineering service for detection, measurement and microscope equipment.
From particle detection systems to advanced SEM microscopes, we’ve been installing, relocating and commissioning metrology tools in fabs and cleanrooms globally for 35+ years.
Whether you want to install a KLA Surfscan system, contract field service support for a Leica microscope, or relocate a full suite of OptiProbe and NanoMetrics tools, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- Wide range of metrology tools supported
- Worldwide support
Partnerships
Equipment We Support
Use the drop-downs below to explore the full list of equipment we specialise in working with. Use the drop-downs below to explore the full list of equipment we specialise in working with.
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Detection
- KLA Surfscan 6200
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Measurement
- OPTIPROBE
- NANO Metrics 400 & 800
- Profoliometer
- VEECO Dektak V 200
- LAM Metryx Metior
- CARL Zeiss LEO 1560 SEM
- LECIA LWS3000 CD Measurement
- Metryx DF3
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Microscope
- Leica DM6000
Processes we support
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Particle detection |
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CD measurement |
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Thickness measurement |
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Profile measurement |
Our turnkey metrology tool relocation service
As part of our turnkey relocation service, we cover every part of your project in-house.
- Comprehensive site surveys, method statements and risk assessments
- Decontamination
- Tool dismantling and de-installation
- Shipping brackets/lockdown kit
- Tool move-out
- Export packing
- Door-to-door freighting, including customs
- Tool move-in
- Assembly and start-up
- Final tests
Support services for metrology tools
We provide a comprehensive range of support services to keep metrology tools running at peak performance.
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Field Service support, including: emergency tool-down support, short or long-term contract-based support, and bespoke training. |
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Structural machine bases |
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Parts sourcing and provisioning |
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Upgrades |
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Compliance testing, including: UKCA/CE marking, PUWER assessments, and EMF testing |
Why IES?
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Proven track record
We have over 35 years of experience working with metrology tools in fabs and cleanrooms across the globe.
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OEM trained engineers
Many of our engineers have decades of experience working with some of the most prestigious OEMs, including KLA, Leica, NanoMetrics, Veeco, Zeiss, and Metryx.
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Specialist skills matching
We use our Skills Matrix to match you with the most qualified engineers for your equipment processes and project.
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Multi-disciplinary teams
Our metrology specialists also bring cross-training in photolithography, thin film, and backend processes, giving them the versatility to integrate inspection and measurement into full fab workflows.
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Worldwide support
Our global teams can support your project, wherever in the world you're based.
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Compliance & quality assured
We meet SEMI standards and OEM specifications in all installations, relocation and maintenance work.
Trusted by Microchip, Analog Devices, Nexperia and more
We've supported both manufacturers and end users to move, install and commission metrology tools since 1991, and we have strong working relationships with multiple world-class manufacturers.
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“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”
- Chief Operating Officer, Plessey Semiconductors
Additional areas supported
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Photolithography |
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Diffusion |
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Etch |
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Thin Film |
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Sub-Fab |
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Backend |
Speak with a metrology equipment specialist
Request a callback from one of our team or book a site survey for your project.

