Thin Film
Get a turnkey engineering service for PVD, CVD, and ALD equipment.
From physical/chemical vapour to atomic layer deposition tools, we’ve been installing, relocating and commissioning thin-film tools in fabs and cleanrooms globally for 35+ years.
Whether you want to install an Oxford Instruments PlasmaPro system, contract field service support for a Novellus Concept CVD tool, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- 60+ thin-film tools supported
- Worldwide support
Thin Film
Get a turnkey engineering service for PVD, CVD, and ALD equipment.
From physical/chemical vapour to atomic layer deposition tools, we’ve been installing, relocating and commissioning thin-film tools in fabs and cleanrooms globally for 35+ years.
Whether you want to install an Oxford Instruments PlasmaPro system, contract field service support for a Novellus Concept CVD tool, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.
- OEM-trained specialist engineers
- 60+ thin-film tools supported
- Worldwide support
Partnerships
Equipment We Support
Our highly skilled engineers support 60+ thin-film tools. Use the drop-downs below to explore the full list of equipment we specialise in working with.
-
Physical Vapour Deposition (PVD)
- Applied Materials P5000 PVD
- Varian 3190/3290 should be 3180/3290
- SPTS/Trikon/Electrotech MS6200, 6210, Sigma 200, Sigma FxP, Delta fxP
- Balzers
- Varian 3190/3290
- LAM (Novellus) Vector & Solar
- Evatec BAK 501/901/600/1100
- PPS Paralene Deposition
-
Chemical Vapour Deposition (CVD)
- Applied Materials P5000 CVD
- Oxford Instruments PlasmaLab/Pro 80, 100, 133, 800
- Oxford Instruments PlasmaPro 400, 1000
- SPTS/Trikon/Electrotech ND6200, 6210, Sigma fxP, Delta 201, Delta fxP, Delta i2L
- SPTS/Trikon/Electrotech Planar 200, Planar fxP
- Veeco Savannah, FIJI
- Novellus Concept 1
- STS (SPTS) Multiplex
-
Atomic Layer Deposition (ALD)
- Oxford Instruments OPAL
- Oxford Instruments FlexAL
- Oxford Instruments NanoFab
- VEECO Fiji, Savanah
Processes we support
|
|
PECVD - Oxide, Nitride, OxyNit |
|
|
|
All metal dep inc iPVD iPVD |
|
|
|
PECVD |
|
|
Evaporator
|
|
|
Atomic Layer Deposition |
Sputtering
- Electrotech MS5200/6200
- Varian 3180
- KDF 942i & 943i
- SEZ Z550 Sputter
- Alcatel 850
- MRC 850 / 3180
- Varian XM90,3190
Our turnkey thin-film tool relocation service
As part of our turnkey relocation service, we cover every part of your project in-house.
- Comprehensive site surveys, method statements and risk assessments
- Decontamination
- Tool dismantling and de-installation
- Shipping brackets/lockdown kit
- Tool move-out
- Export packing
- Door-to-door freighting, including customs
- Tool move-in
- Assembly and start-up
- Final tests
Support services for thin-film tools
We provide a comprehensive range of support services to keep thin-film tools running at peak performance.
|
|
Field Service support, including: emergency tool-down support, short or long-term contract based support, and bespoke training. |
|
|
Structural machine bases |
|
|
Parts sourcing and provisioning |
|
|
Upgrades |
|
|
Compliance testing including UKCA/CE marking and PUWER assessments, and EMF testing |
Why IES?
-
Proven track record
We have over 35 years of experience working with thin-film tools in fabs and cleanrooms across the globe.
-
OEM trained engineers
Many of our engineers have decades of experience working with some of the most prestigious OEMs, including Oxford Instruments, Novellus, Evatec, Veeco, SPTS, Trikon, Electrotech, and Varian.
-
Specialist skills matching
We use our skills matrix to match you with the most qualified enginners for your equipment processes and project.
-
Multi-disciplinary teams
Many of our thin film specialists are also trained in metrology, photolithography, diffusion, and other related fields, making them adaptable to multi-tool environments.
-
Worldwide support
Our global teams can support your project, wherever in the world you're based.
-
Compliance & quality assured
We meet SEMI standards and OEM specifications in all installations, relocation and maintenace work.
Trusted by Microchip, Analog Devices, Nexperia and more
We've supported both manufacturers and end users to move, install and commission thin-film tools since 1991, and we have strong working relationships with multiple world-class manufacturers.
![]()
“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”
- Chief Operating Officer, Plessey Semiconductors
Additional areas supported
|
|
Photolithography |
|
|
Diffusion |
|
|
Etch |
|
|
Backend |
|
|
Sub-Fab |
|
|
Metrology |
Speak with a thin-film equipment specialist
Request a callback from one of our team or book a site survey for your project.

