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Photolithography Equipment Support

Get a turnkey engineering service for stepper, scanner, alignment, coat/develop and cleaner equipment.

From steppers and scanners to coat/develop tracks and aligners, we’ve been installing, relocating and commissioning photolithography tools in fabs and cleanrooms globally for 35+ years.

Whether you want to install an ASML or Nikon stepper, contract field service support for a TEL Cleantrack coater/developer, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.

  • OEM-trained specialist engineers
  • 40+ photolithography tools supported
  • Worldwide support
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Photolithography

Partnerships

  • Infineon
  • Axcelis
  • Nexperia
  • Applied Materials
  • Intel
A stack of polished silicon wafers
We work with IES because we trust them. We know that when a critical situation occurs and we have a tool down they’ll support us, not just with parts but also by providing experienced engineers if we need them. It’s a complete solution.
Analog DevicesImplant Centre Manager,Analog Devices

Equipment we support

Our highly skilled engineers support 40+ photolithography tools. Use the drop-downs below to explore the full list of equipment we specialise in working with.

  • Stepper
    • SML PAS 2500/10 -/40
    • ASML PAS 5000/45 /55 /60
    • ASML PAS 5500/22 /100  /200 /300 DUV Stepper
    • GCA 6800 Stepper
    • NIKON NSR 1755 i7, 2005 i9, 2005 i10, 2005 i11 Stepper
    • Ultratech 1000/1100/1500
    • Nikon i12, i8
  • Alignment
    • EVG 620/6200
    • EVG 40NT Aligner
    • SUSS Microtech MA200, MA56, MJB3, MA150, MA6, MA4,
    • CANON PLA-510 contact aligner
    • CANON PA-600 projection aligner
    • Perkin Elmer 341 Micralign projection aligner
  • Coat/develop
    • EVG 101 / 150 Coater
    • FSI Polaris 2000
    • SVG / UTS Track Coater
    • SUSS Microtech ACS 200
    • SVG 81 & 86 Coater Developer
    • TEL Cleantrack MK V, MK7 Coater Develop
    • Karl Suss Gamma Coater/Develop
    • DNS 80A, 80B
    • Fusion M150, M200
  • Cleaner
    • SSEC M300ML Mask Cleaner
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Processes we support

  • I Line
  • DUV
  • X-ray
  • Electron Beam: LECIA VB6 E-Beam, NanoBeam nB5 E-Beam
BOOK A SITE VISITContact us

Our turnkey photolithography tool relocation service

As part of our turnkey relocation service, we cover every part of your project in-house.

  • Comprehensive site surveys, method statements and risk assessments
  • Decontamination
  • Tool dismantling and de-installation
  • Shipping brackets/lockdown kit
  • Tool move-out
  • Export packing
  • Door-to-door freighting, including customs
  • Tool move-in
  • Assembly and start-up
  • Final tests
Turnkey

Support services for photolithography tools

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Trusted by Microchip, Analog Devices, Nexperia and more

We've supported both manufacturers and end users to move, install and commission photolithography tools since 1991, and we have strong working relationships with multiple world-class manufacturers.

An IES engineer carrying out compliance testing on semiconductor equipment
“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”
Plessey Semiconductors- Chief Operating Officer, Plessey Semiconductors
View case study

Why IES?

IES engineers installing an ion implanter on a semiconductor fab floor
  • Proven track record

    We have over 35 years of experience working with photolithography tools in fabs and cleanrooms across the globe.

  • OEM trained engineers

    Many of our engineers have decades of experience working with prestigious OEMs, including ASML, Nikon, Canon and EVG.

  • Full line support

    We offer support for steppers, scanners, coat/develop tracks, aligners, and mask cleaners as a complete lithography suite.

  • Specialist skills matching

    We use our skills matrix to match you with the most qualified engineers for your equipment processes and project.

  • Multi-disciplinary teams

    Many of our photolithography specialists are also trained in metrology, diffusion, thin film, and more, making them adaptable to multi-tool environments.

  • Worldwide support

    Our global teams can support your project, wherever in the world you're based.

  • Compliance & quality assured

    We meet SEMI standards and OEM specifications in all installation, relocation, and maintenance work.

Learn more

Additional areas supported

Speak with a photolithography equipment specialist

Request a callback from one of our team or book a site survey for your project.

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