Photolithography Equipment Support

Get a turnkey engineering service for stepper, scanner, alignment, coat/develop and cleaner equipment.

From steppers and scanners to coat/develop tracks and aligners, we’ve been installing, relocating and commissioning photolithography tools in fabs and cleanrooms globally for 35+ years.

Whether you want to install an ASML or Nikon stepper, contract field service support for a TEL Cleantrack coater/developer, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.

OEM-trained specialist engineers
40+ photolithography tools supported
Worldwide support

Book a site survey

We work with IES because we trust them. We know that when a critical situation occurs and we have a tool down they’ll support us, not just with parts but also by providing experienced engineers if we need them. It’s a complete solution."

Implant Centre Manager,

Analog Devices

	I Line
	DUV

X-ray

Electron Beam:

LECIA VB6 E-Beam
NanoBeam nB5 E-Beam

Our turnkey photolithography tool relocation service

As part of our turnkey relocation service, we cover every part of your project in-house.

- Comprehensive site surveys, method statements and risk assessments
- Decontamination
- Tool dismantling and de-installation
- Shipping brackets/lockdown kit
- Tool move-out
- Export packing
- Door-to-door freighting, including customs
- Tool move-in
- Assembly and start-up
- Final tests

Field service support, including: emergency tool-down support, short or long-term contract-based support, and bespoke training.

	Structural machine bases
	Parts sourcing and provisioning

	Upgrades
	Compliance testing, including: UKCA/CE marking, PUWER assessments, and EMF testing

Trusted by Microchip, Analog Devices, Nexperia and more

We've supported both manufacturers and end users to move, install and commission photolithography tools since 1991, and we have strong working relationships with multiple world-class manufacturers.

Plessey_Logo-4

“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”

- Chief Operating Officer, Plessey Semiconductors

View case study

Diffusion

Etch

	Sub-Fab
	Thin Film

	Backend
	Metrology

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Photolithography Equipment Support

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Our turnkey photolithography tool relocation service

Support services for diffusion tools

Why IES?

Trusted by Microchip, Analog Devices, Nexperia and more

- Chief Operating Officer, Plessey Semiconductors

Additional areas supported

Speak with a photolithography equipment specialist