Etch

Get a turnkey engineering service for dry and wet etch tools.

From plasma etch chambers to wet benches, we’ve been installing, relocating and commissioning etch tools in fabs and cleanrooms globally for 35+ years.

Whether you want to install an Oxford Instruments PlasmaPro system, bring in contract field service support for a LAM TCP etcher, or relocate a full production line, our highly experienced engineers handle every aspect of your project from start to finish.

OEM-trained specialist engineers
70+ dry and wet etch tools supported
Worldwide support

Book a site survey

Etch

Get a turnkey engineering service for dry and wet etch tools.

From plasma etch chambers to wet benches, we’ve been installing, relocating and commissioning etch tools in fabs and cleanrooms globally for 35+ years.

OEM-trained specialist engineers
70+ dry and wet etch tools supported
Worldwide support

Book a site survey

We work with IES because we trust them. We know that when a critical situation occurs and we have a tool down they’ll support us, not just with parts but also by providing experienced engineers if we need them. It’s a complete solution."

Implant Centre Manager,

Analog Devices

Dry Etch
- SPTS/Trikon/Electrotech – Omega 2, 201, fxP
- Oxford Instruments PlasmaLab/Pro 80, 100, 133, 800
- Oxford Instruments PlasmaPro 1000
- Oxford Instruments IonFab 300
- Alpha Plasma – Asher Various
- STS PE508
- JLS Designs MPS1400
- AMAT 8110 / 8320/30
- AMAT MxP+
- Electrotech MS5200/6200
- Tegal 901/903e
- Gasonics Asher A1000/Aura
- Plasmatech Asher PRS800
- Matrix 101/103
- Branson/IPC 3100 Asher
- LAM Rainbow 4500
- LAM Rainbow TCP 9600
- LAM AutoEtch 490/590
- LAM 4520xLi
- Electrotech (SPTS) PE4200/5200
- AMAT P5000
- HIRRIE 100 Series
- Alcatel AMS200
- Adixen iProductivity
- Adixen iProductivity
- LAM Alliance Etch TCP
- SCIA Mill Ion ETCH
- Alcatel 201/601/GIR261/263

Wet Etch
- Kaijo wet bench – phos, Piranaha, strip
- Amerimade
- MEI Wet bench
- Semitool SAT/SST
- DNS FC3000
- Felcon Wet Bench
- SEZ 200/201/203
- Steag wet bench
- EVG 301 Cleaner
- Semitool SRD’s
- kemsafe / CSTI Wet Bench
- Felcon Wet Bench
- Convac 2000/6000/8000/mutipak
- FSI – Titan, Saturn, Mercury, Proteus

Nitride Etch

Resist cleans

HF Etch

Wet Strip

Metal & SI Etch

Dielectric Etch

ALD

PERIE/MORIE

Our turnkey etch tool relocation service

As part of our turnkey relocation service, we cover every part of your project in-house.

Comprehensive site surveys, method statements and risk assessments
Decontamination
Tool dismantling and de-installation
Shipping brackets/lockdown kit
Tool move-out
Export packing
Door-to-door freighting, including customs
Tool move-in
Assembly and start-up
Final tests

Field Service support, including: emergency tool-down support, short or long-term contract-based support, and bespoke training.

	Structural machine bases
	Parts sourcing and provisioning

	Upgrades
	Compliance testing, including: UKCA/CE marking, PUWER assessments, and EMF testing

Trusted by Microchip, Analog Devices, Nexperia and more

We've supported both manufacturers and end users to move, install and commission dry and wet etch tools since 1991, and we have strong working relationships with multiple world-class manufacturers.

Plessey_Logo-4

“IES are reliable, flexible, and knowledgeable of the semiconductor industry, so were the best partner for the installation project.”

- Chief Operating Officer, Plessey Semiconductors

View case study

Photolithography

Diffusion

	Sub-Fab
	Thin Film

	Backend
	Metrology

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Etch

Etch

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Our turnkey etch tool relocation service

Support services for diffusion tools

Why IES?

Trusted by Microchip, Analog Devices, Nexperia and more

- Chief Operating Officer, Plessey Semiconductors

Additional areas supported

Speak with an Etch equipment specialist