• 6200AV
• GSD Series
• GSD HE
• GSD VHE
• OPTIMA

• E220
• E500
• VIISION 80/200
• VIISta 810XP
• 900XP
• HC
• HE

• 9500xR
• xR80
• Quantum

• Full mechanical and electrical separation of beamline, source, end station, and sub-fab modules
• Exhaust, cryo, gas, water, and fibre line disconnection and capping
• Structural disassembly (doors, I-beams, trusses, flow hoods) and cleanroom de-rigging
• Decontamination and safety verification

• Design and fitting of custom crating and transport brackets
• Structural bracing
• Crating and wrapping of high-value and sensitive components
• Weight verification, stencilling, and shipment documentation
• Coordination with logistics partners for international shipment

• Tool offload, de-crating, move in, positioning and subassembly layout
• Mechanical assembly of the frame, beamline, source housing, and end station
• Leak testing, safety checks, and interlock verification

• Beamline and magnet alignment using OEM or calibrated reference jigs
• Motor shaft to generator alignments
• End station and wafer handling alignment to OEM specification
• Vacuum and mechanical interface verification
• Vibration control and chamber alignment checks

• Startup and final test
• Beamline conditioning and vacuum bake
• Source ignition and beam tuning
• Energy and dose calibration
• Control system testing and recipe verification
• Handover documentation and operator training

• Source rebuilds and arc chamber servicing
• Beam focus, energy calibration, and drift correction
• Magnet alignment and tuning
• Contamination prevention and vacuum integrity

• Mechanical assembly and precision alignment
• Electrostatic chuck calibration and replacement
• Wafer handling system setup and testing
• Implant uniformity and dose control

• Pump, throttle valve, and leak check services
• RF generator diagnostics and power supply tuning
• Gas and purge line setup and validation

• Beam uniformity improvement
• Dose accuracy and repeatability tuning
• Process troubleshooting and parameter optimisation

We have over 35 years of experience working with ion implanters in fabs and cleanrooms across the globe.

We have decades of experience working with major OEM platforms, including Axcelis, Varian, AMAT, SEN, and Nissin.

We support the entire ion implanter lifecycle, from move in, assembly, alignment, utilities connection and start-up to full production qualification and ongoing optimisation.

Our global teams can support your project, wherever in the world you’re based. With field service engineers based in Europe, the US and Asia.

Working with our teams guarantees restored uptime, improved beam stability, and higher throughput.

Never be left waiting. We provide on-site and engineering support to fix any issues as quickly as possible.