scia Systems develops ion beam and plasma process systems for nanometer-precise processing of surfaces. The products of scia Systems are used in the production of microelectronics, MEMS and precision optical components in both high volume production and research & development. Key applications are frequency and thickness trimming in the manufacture of BAW/SAW devices and multilayer coating of optics for extreme ultraviolet lithography (EUVL).
scia Systems provides highly reliable tools together with superior technical support. The tools are flexible and modular in design. Several vacuum chamber processes can be combined into cluster or in-line solutions according to customer requirements.Back