scia Coat 500
Used for the homogeneous coating of high precision optics, the scia Coat 500 is utilised in applications such as multilayer films for x-ray mirrors and filter coatings. The system applies a beam onto a rectangular sputter target from a linear ion beam source.
A good homogeneity of the deposited film in one dimension is provided by the linear geometry. In a direction perpendicular to the profile of the beam, the sample is moved on a linear axis. This stage possesses a spin rotation and changeable shaper system with up to four shapers.