scia Batch 350
Biocompatible coatings on 3D-substrates by Plasma Enhanced Chemical Vapor Deposition
The scia Batch 350 offers plasma enhanced chemical vapour deposition for biocompatible coatings on 3D substrates.
Used for homogeneous coating of multiple three-dimensions shaped substrates in one group, the scia Batch 350 is typically used in applications such as biocompatible films for medical objects.
With an RF parallel plate arrangement for each substrate rotation, the scia Batch provides a homogenous coating of all sides. An additional DC bias, applied to the substrate holder, is also available with the system.