Metrology

Metrology is the science and technology of measurement at the micro- and nanoscale, essential for ensuring precision, quality, and reliability in semiconductor, MEMS, photonics, and advanced materials fabrication. Semiconductors – Critical dimension (CD) monitoring, layer thickness measurement, defect detection. Typical applications include: MEMS devices, Photonics & optics, Thin-film deposition, R&D and process development.