The University of Southampton is recognised as a leader in Optoelectronics and is home to the Silicon Photonics Group, the group recognised as having carried out the work upon which the first company in silicon photonics was built.
With the intention of further supporting the UK’s silicon photonics research community the university planned the installation of a cost effective multi-project wafer service, a project that required an anti-vibration pedestal for their DUV (Deep Ultra Violet) scanner to be located in their upgraded clean room facility. IES were asked to design, supply and install this pedestal.
Section pedestal for Stepper in 1200mm raised access floor (installed at Southampton University, UK)
IES has considerable experience in the design and manufacture of support pedestals/tables for heavy or vibration sensitive production and R&D equipment. Typically these are used in the semiconductor fabrication process or in environments where a raised access computer floor is required. We were therefore ideally suited to meet Southampton University’s requirement.
The bases we manufacture for vibration sensitive equipment are individually designed to provide the appropriate structural support without permitting the amplification of those vibrational energies that would interfere with the performance of the equipment being supported.
Our first task was to complete detailed on site vibration testing prior to designing the pedestal and computer modelling it. Vibration testing is carried out both pre and post installation.
Our design had to meet the requirements of:
- The dimensional, vibrational and load bearing specification of the equipment to be supported
- The existing under floor services, which had to be bridged
- The limitations of site access
Dr Iain Anteney, Southampton University’s Cleanroom Complex Manager says:
“The University of Southampton used IES to design and install an anti-vibration pedestal for their DUV scanner as part of a £1M upgrade to their cleanroom facilities aimed at providing the UK Silicon Photonics Research Community with a cost effective multi-project wafer service. The ability of IES to provide a complete turnkey solution, including design, build, install and final equipment positioning provided the University with a streamlined and practical solution.”
Another client for whom we’ve designed and installed a number of anti-vibration platforms is Xaar, the world’s leading independent supplier of industrial inkjet print heads. Speaking about IES Jerry Davies, Facilities Manager, Xaar PLC says:
“We have built up a trusted relationship with IES who have been have been reliably providing us with tool moving, export packing and transport services for almost a decade. They have designed and installed over a dozen support pedestals in our Huntingdon clean room suitable for our heavier and vibration sensitive production tools.”
Pedestal for Metrology tool – 240mm raised floor (installed at Xaar, Huntingdon, UK)