- Equipment Partners
- Products
- Plasma Parylene Systems (PPS)
- Parylene Coating
- Series 3000 LV 600/700
Series 3000 LV 600/700
The Series 3000 LV 600/700 is a modular parylene coating system designed for scalable production environments. It features a two-part configuration, comprising a chamber module and an evaporator module, allowing for flexible setup and maintenance. This system is ideal for applications requiring high throughput and consistent coating quality.
Key Features:
- Scalable, modular design is ideal for high-throughput industrial operations, offering flexibility in configuration and maintenance.
- Large chamber volumes and dimensions accommodate substantial batch processes or oversized components.
- Integrated high-power plasma ensures superior surface activation—key for consistent and durable parylene coating.
- Multi-gas channel capability supports process versatility for complex coating recipes.
- Sophisticated cooling, vacuum, and electrical infrastructure reinforce reliability and operational efficiency.
Technical Data:
- Dimensions: L: 2400mm W: 960 H: 1460mm
- Weight: ~ 350 KG
- Volume: 600 / 700 Liter
- Process chamber: 800mm Ø H: 1100mm (600 Liter) / 1300mm (700 Liter)
- Plasma source: 2,45GHz, 1200 Watt
- Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3
channels possible - Cooling system: 8 liter (electromechanical Cool-trap)
- Vacuum connection: DIN 63 ISO-KF
- Venting: electromagnetic solenoid valve
- Pump system: 75m³/h
- Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
Applications:
- High-Volume Electronics Manufacturing PCBs and Assemblies: For conformal coating of electronic assemblies (PCBs, sensors, RF modules) in production runs. Parylene provides excellent moisture, dust, and ionic protection. High-Reliability Components: In sectors like telecoms, industrial automation, or consumer electronics, where uniform, pinhole-free coatings improve device reliability.
- Aerospace & Defense Because of its large chamber, the system could coat bigger or more numerous parts (e.g. avionics boards, satellite components, sensors) in batches. The plasma activation helps ensure very strong adhesion, which is critical in harsh environments (vibration, temperature cycles, outgassing concerns). Parylene provides a barrier to moisture, corrosion, and provides dielectric insulation.
- Automotive / EV Applications Protecting control electronics, sensors, connectors, and in-vehicle modules. The large chamber means good throughput for automotive-scale runs.For EVs, battery management systems, power electronics, and sensors all need strong, stable coatings that can handle varying thermal and chemical stress.
- Medical Devices Coating of medical components (e.g. catheters, implantable devices) where biocompatibility, barrier properties, and very precise control over coating are needed. Also useful for medical MEMS or microsystems in high-volume production.
- Industrial & Harsh-Environment Sensors Sensors used in industrial automation, chemical plants, or oil & gas need protection from corrosive environments, humidity, dust. The modular nature + multi-gas capability means processes can be more finely tuned for particular sensor types.
- Microstructures / MEMS / Research-Scale Production Though this is a large-volume system, research organisations or advanced device manufacturers working on MEMS, microfluidics, or micro/nano devices could use it when they need to scale up from lab to pilot production. The clean, conformal, pinhole-free nature of parylene is very valuable for micro-devices.
- Barrier & Corrosion Protection for Non-Electronic Parts Parylene can be used to coat plastics, rubber, elastomers (e.g. seals, O-rings), giving them improved chemical resistance. Transparent protective coatings on optoelectronic devices (e.g. LEDs) or mechanical parts.
Book a Live or Virtual Demo
See the capabilities of our partners' equipment - including EVG, scia Systems, Veeco, PPS and SSI - in action. Experience tailored demonstrations designed around your process and application needs.

