scia Coat 500
The scia Coat 500 is designed for the homogeneous coating of large substrates, ideal for precision optics. With recipe-controlled deposition processes, it ensures repeatable quality for multilayer stacks. A customisable shaper system (up to 4 shapers) compensates for material- or parameter-dependent inhomogeneity effects, enabling the deposition of precisely defined gradient films.
Key features:
- Excellent uniformity due to linear movement
- Up to 6 water-cooled target materials on a rotational holder for in-situ change
- Recipe controlled multilayer deposition with quartz crystal oscillator and/or optical thickness monitor (OTM)
- Controlled movement of linear axis system for gradient coating or surface error correction
- Optional substrate heating up to 250 °C to optimize film stress
Applications
- Precision optics & photonics: The Coat 500 is designed for large-substrate and large-area coating, especially optical mirrors and high-precision optics.
- X-ray / synchrotron optics: Multilayer coatings (e.g., Bragg mirror stacks) for X-ray mirrors, synchrotron beamlines, and other analytical optics.
- Large-area optical filters & bandpass mirrors: For large substrates (up to ~500 mm × 300 mm) used in optics, lasers, and maybe display or sensor systems.
- High‐value multilayer thin film manufacturing: Where defect-free, dense, smooth films are required — e.g., dielectric/metal stacks for specialized coatings.