scia Batch 350
The scia Batch 350 is designed for biocompatible coatings of 3D-shaped substrates. Its flexible carrier concept accommodates different substrate sizes and shapes within a single batch. With a stable, reproducible, and certified process, the system ensures high-quality standards, making it ideal for the treatment of medical objects.
Key Features:
- Coating of different substrate sizes and quantities in batches due to carrier loading
- Two independent RF electrodes for high throughput
- Homogeneous “all-around coating” by individual rotation of each substrate
- Superior barrier performance and fully cohesive film, also during mechanical deformation
- Combination of heating, plasma pre-treatment and PECVD coating
- Flexible gas and RF conditions
Applications:
- Precision optics / large-area optical substrates:
The Multi 680 supports very large substrates (up to ~680 mm diameter) which are commonly used in optics, mirrors, beam-line components, synchrotron or X-ray optics. - Multilayer thin-film coatings: Especially for applications requiring periodic multilayers (e.g., X-ray mirrors, Bragg reflectors, anti-reflective stacks) on large substrates.
- High-end manufacturing for niche/large substrates: Because of the ability to handle large and potentially heavy substrates, this tool is suited for production of large optical components rather than just small wafers.