Skip to the main content.
 

Join Our Team

We're actively recruiting for a range of roles across sales, engineering, IT and warehouse. Check our careers page to see open positions including apprenticeships. 

View Jobs →

Apprentice_1

 

A Complex Intercontinental Move and Assembly Project for Multiple Ion Implanters

At IES, we love a challenge. In fact, the more complex the project is, the better.

Read Case Study →

Ion Implanter in a Fab

The Subtle Art of Relocating Complex, One-of-a-Kind Equipment Across Borders

Few complex engineering projects compare to the challenge of relocating sensitive, high-technology equipment across borders.

Read Case Study →

LIST 1

Trusted Partners for the Microelectronics Industry

At IES, we partner with leading global manufacturers to provide an extensive portfolio of advanced technologies supporting research, development, and production across the semiconductor and compound materials industries.

Learn More →

partners3x

Move complex, business-critical equipment

Whether you’re moving a single piece of equipment or an entire production line, our trusted team of engineers can support every step of your move, from rigging to end-to-end relocation support across the globe.

Download Brochure →

Equipment_Move_In_Cleanroom_Flexi_Card

 

Firebird

<p>Veeco Firebird batch ALD system is an innovative, fully automated solution for high volume production of pinhole-free oxide layers for deposition of dielectrics, passivation, encapsulation, and seed layers films. Built on the proven Phoenix ALD system, the Firebird’s unique modular architecture decouples substrate heat-up and cool-down and mitigates wafer breakage with its innovative batch transfer design – a unique advantage for customers using fragile wafers such as LTO, LNO, and Glass. Capable of handling 100, 150, 200, & 300mm wafers, the Firebird couples unmatched flexibility and performance at the lowest cost-of-ownership.</p>

<h3>Features<h3>

<ul><li>Batch deposition of oxide films for seed layers, encapsulation & barrier layers, optical coatings</li><li>Effective parallel processing for best-in-class throughput</li><li>Decoupled thermal management for preheat and cool-down</li><li>Zero-wafer handling at elevated temperature for fragile / temperature sensitive substrates (glass, quartz, LNO/LTO, GaN)</li><li>Flexible and upgradable modular configurability</li><li>Seamless wafer scalability (100 to 300mm)</li><li>SECS/GEM equipment communication</li><li>SEMI S2 compliance</li><li>Veeco worldwide sales, service and support </li></ul>

<h3>Configurability advantage</h3>

<p>The modular system configuration can be effectively tailored to minimize process flow bottlenecks and offers outstanding processing flexibility.</p>

<p><img src="data:image/webp;base64,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" data-mce-paste="true"></p>

 

<p>2 reactors, 1 heat up module</p>

<p><img src="data:image/webp;base64,UklGRpglAABXRUJQVlA4IIwlAACwoQCdASqnAWkBPkkkj0WioiERKPUUKASEtLd6UZOPWZkaIIa9Xyqcs5r0SE54jVS/vW+S8naAb0f/4D0suibzsvpv/tW/VegB4AHxL+UBnIHlD+efbnwt8wfu728+Ov9Uyp/E/4vmV9cn3v+E9wvZr8vv9X1C/yv+qf7jfXbaegX7kfdf+v6gP4H/Y9GvtJ7An65f8T1r/63iE/k/+x7A388/vX/X+7z5b//Tz2ftf+5/+XuNfrx/1P8QMkREREQ+pANe6Z9cp5w5dmzKdEkJd7khIiIiIiIiIiIiIdorsUw6+Rw41q5mZmZmZmZmZmZmYB0poGSdCCcfNkWIumhZOWA+1+SxN3d3d3d3d3efVkiFVGNV5TscPjAtsAKqqqqqqqqqqqqT4+x6hmEfYzFVFG+8/wMSmF8d6pc7GSxN3d3d3d3d3dvsehAzmpsl4EzbQEchQa6T+7y6Q0fsCWJmZmZmZmZmZmZlW10Ysb8E0Pf2lhkpug2hpnoRIf7pqpVVVVVVVVVU8fyycFz6YCM7jtJb7to6d4cSsuJqpuxPZ7EjqMeUXfIb5BxF+Wh3m3ZLMPzJfw6PsOL70fXOEBRozMzMzLschiezcXiJywuSBNMcsHxb5bBIyXKVTYsrUtk4UTgyQta62fZZ9UJ9Y8DzxAj1f4UH76LIDAOOM6vr8ZqqqqqqqlpBGi7f6udwogKf+UNUfYE7F60S6Z2/XTHnM7GFq07MhqTAdPcIL5fWFNJX2ayNLRP9/Lx8ECzV0ls72oD4M4+7MzMzMzMWjomLVuPrRKqHYVhb+scS3GLzs1FXvbWuhLyMVu9LsMjGbM1BrDp+WwUJ3YybvSEPSbTd3d3d3d2S153dwC+p/jPazecK3RiPCXTq+8BTodzcs+qi/HiomNiuAV6ycyURXd3d3d3d3dxJTCaI2V7em8T2tn389QuJJ8fVyJlNSfHNsdCVYZWsqlR1YKULnj4KLuFijJ4m7u7u7u7uxhvesBV6M6kJ7hkJlxD2bt4y+KSU37XVoQb3R+6klh6lpi3/9V6tEbr1WlssRK8Cn79LekrjvUulPj1VVVVVVVVPccHTaM13gVp9flqxSVXbA65GL8/VIVZMIZs/qeez1B7ZnjxciB15xRWF2dOVZ92H5oNysU3dH261yDIwCSzMzMzMzMfg2i5s+wn1s5/VXm/aWvyAhzVAD0LeVV7KtBrcrcul0/kWI2TwIggy4u15IZPgvprt0LICcHbrDwjMzMzMzMzJfw2Sg8BNYwrYp6V7pIKyElZvYKIML9ut6LVqPPC/2dfn/Rrjepsi9SJJ8fSkEUE5tmmqqqqqqqqlXhm3XoLWiH3oQbu7rr9oBpcLlxT0V95v065OwtGERc91Pt3zlhcPWdZ5L5Q1I63RcafJuZl2YxqsreJu7u7u7u7QFWSieIg6U3Wb0dAKr5Re2gtcVYBbdlAPm3aDt+kWhfcPaZSmjpGD4YKkwhBvjcU92qFw9fEPgF3d3d3d3dz5Mp4tkq/ty+8vw5jMbBCcqfYCXJzDJjalRBs/yNxqT6ey3uRlTj10LP6/Vp/49Y8JwW/AGtgjXlknExCWJu7u7u7CBSkKKFygibxT6XYvAnnseRWjWudYzjLCozJLuZ1I4/3QkAzZ02VywvdNjIA4cmu7u7u7u7uLYUjPrGvL8xsPwNbbFLjSSk/BbjgdhivZ4LsaTn91kBEnxkmZmZmZmZmZ0gdTTX9Lu2ZmZSAA/v+/QATMeRy+bRhx6s0/jJheoVSefogu4og6m4Ta6U6XEPnzxstPqEJkM6pHpAANIfea4qlQ9WZuHkYjyiYSWe5A8C2CQPKs8ejj6rbe5vAAF7bUvjVrxAgH/d7ZPNuq7xNs/JzHnZBkuIjCwK1iaV1KokqONzo0UAuUoXs1IoSmoLnIJTywOO/RIu3AAoyZreoDNT/HTPtjRs7ly2liSddTd64Ta1g3MZQToXP/MEPzkjgGAfeFjUymducaNNgy3RPNuj4o1CbwJZwlbP0jmhnT5ZbNRzASWjAAFiuhG+/bLAmmgYC8IR5zBeb6oi6TpqeoGbX+yJJhSdGRGf0eqvF+LqrBEfMM1N/BH4xAc3FAPNiqXYwljpyugwve3VbU9sAr4mhzJZ5na7+9WSLe/UJRiLdv5KAgwG0HqMGs+598pgsJzd+8RDTwhegZfjJRtW6vToA+M6j5MW9OxonSeAECB0RCumSEWayO3JuN2hLSTboV3yRbk25ZLEuoqSR/hrcmGN7pYLz+7n2Bcw0mt1J2uDLLnsPNk2fxTnFJ0zhyBpcEgUOCs/CBBMdKblvEAecIVt048Wdou2lcWoOaM1YFi2QxIkACqKrIo44IMYfcamNMBnCr8c7AsQGrMQ37z//D8zpvITFXdSdHR8cs5q8bR8kC+FDrSXAAAKAUEa35vQ3cIxjdEo9ey71yBbAzNOCJ6ONk4ZRqp9kC7V87apV7BqvzrQuiKmdut8I758VulgEupWN+i5qAUMLcbNYSUvbvtHJ2Su4/cr+it3Po2IjBniL/5nb/HZfKxx/k9/4gRA6z334WauZP6QvxUbmGKemJMvtf4Ak0CiCx702WbjYLBGWQBeZSFzL3EuEncbe6IDM/71EZqtI7Qk+VQLpKKjZKbETFd5rAn7Vh/JhYF/hYyyGr+pzcmnwYGmMbF326OAMkY7uvhSlCN/gISC33POU28tcrFkYVlwlKFf+4bSQg+LHRB5dete0oTwmVMNqRn91c7lv7VQWlPXtR7A/Jx7ZEKF0z5Cms3U2krJHjJjkT9usmxb9uwjw41XnL6uncRRRG6jknQXMqX4A86ws5Vu0t2Jr8wUyAc7BsOjwBnE7XuL3bCK8wUgxK6ZFSpkv3lRX0tzWEjZI8HjKMOKzWmYYKbB7+CJVplN3gGa3pXg5JFoYLAkPupt9RjzNHykWooMO1KbgYbgf138v99KlYIKI/8JR3TOxN+UZSvEuNPfTnwTNU0JTmKOdiWYbMpg8StrMSiEalPI0zYJkkPmuzjD9pn+30WvPdGv2COHWX+mqS4+Ec4Q8xnWtMXePsQPJ36L9BF4t0eEXuHL9quL6T2LJhMLOhNjEhPchMkhX352D1NUboQKM2Uq92JNrORsecSHMuYs1uWe/zaYpr6bawQFAmNryLaSHtFUzfhvJwXmk+iK0yb9FEcAVdW9mLgQ2QrJPdfbB9r+oTAdVmbB0pbvtB50AkuCetlCjhmsAOw29PicE2F/PJA+UtmOQsW1fjB+VQRkW/TYxkMX2fvS9jzH5hkWQtC7IfJPx5vkMPwp5FYSlR0FjlL8NRurpYZyruMe5ygg4AerhJVUz+zi2NOpubVtWVSj8VoV/7R/SUYKoRf76n1IXMntDN18iQ4uUL+DMUzU+gdYqJWU6WDG+teWa4FDhT8HTQv3QN5yqEEcF+PGsA8LJcEcI1mBMbyodrojpvYb7n5zs6PHRx7jkg3VXzaYLfxsFsXzceaV6hji6eOnnP73b9ivoJMAe1sZgYy1zUiW3U8YX4mP1lTI7CSLgbM7V16NYrWrZi28rhvxxlD2cYxKd07w12qSpdSP8P6HZ/vV/qTYXhHmhJyN87/pWicRPLA8Z91EAMcs/l6BhmC5GieXsYAiBgrdh/5mDGESjV53fFcmbBTXGV6JmEe5IHbOtE4gXBMW/J/lAxHhFwqIR3j0ADkfbj/CoXXUWjTCABRIhSrJOx7d2PETi+Oldnmku6V/ywFzr0kRiFE6/Bks0L8m6Xn0bj+ZLO0RVAwKn3ay+QzwesgcxMjL5nMf78eRaBGAl/0MG9NxP9p1/nK3T7f1JTskzP6UzrS44tWb688b1BhH0yIyayeqryeiyIqjjBulCz4uQpHPrGZXVOemNlwCt1qQEZzVupAUR1WApyfTA6v+BcQ4yExNmII8zD4eIZf/z+OwiciXub7j66/XvDKZ3n6n+lwX6NsgMQ0vWSzq98MH1XXiT/IuX53FVuaL8DPG9QXhvjM1DVopAtxtiwZHcfpv1DDyMtGRCEfdmA4ig6Y0lt/fTXcf7tV1r4MPx5oRtxt0ussiQntove5jToQOyLxF9ZhZ6sU2IRFj8Gprv1F4nr5dCUHmASeOwk715niXA941e413HsgWiD14AHTrL6lHXXcUg4hEFXCAHSsJpCSKarkTNX6I7ScSNOCHbvMHkhbLc1lyCN1i0f77olE06PA/BJA0Z840woJQDcI8GxLdv7mDtgiclXtS67CbCu/jMPQ4HVh1WsGn5pud5NFM/3RZ18mw8msTWwA8WcQrQ1ik/kFVz+p4ibVHdOQaeVLytPEVvjYWyeeAOK/rQJfDme2/57bmfmTps7GKwi2QSeIgg6RTDSb0Jn5IPQW4Nhh0m4BGsWy/4ld6xC5qoM2T36uTq2PCMx6r3kMZe+iFaKGP4+PWXuRx+YzFT7NFK4l2nfw4ioYomixpgm7Cx22S2yFcdDemH4zFPmNWGgcfqXhQoymtOhaxyGPKaq3RQ2J8FwEcedocM5TgFR3vAM9Ph3VweaZk79+vUXfbhvJ423S4wGCcvrsA6iXz0ALrNr+ze5e6lBFFNDPW1v9MhzOcKAiq1GR1VbY2VT/xW2t53zRdZjUlWTJ8tG2d2pLTBHVBn/nu4KKLTycQxOY4oQUIEwH+uFGjwaXyjyMokKu7LX/Sz0wEowlEhs6Qg2BkUBepuyEeB0IzWgS9XAd6xrQ0fZSc2TwGypqbAgIDOn7nVlcN10FAF7P7yDA3k64bMhhcLvTktnROIhenOVGgVoLQ6esej9MevcB3cIctb0zw4E+1w7t4sIJABm1HLsgOx8Ur3X4LiGRBWuve4hHubVk8pBJAUbvheSRibwEU8/cTbIpdoLL+CBcgM3RRv67RPFtXfEhN4C1JO+YEfOmP+Bc9LsuWEjxTzwSLN89ra0RRWDf8vqV8e2uP1S50sMh1925T4W6e/tTfSx+6od1MH6NlKytmHJ7ayElgVgkx1ui0lDCNhF5ueBsEVAfhSVqDZ9FFRECIA9/z7/QvkcL+KhEYOQHtKTR8Xz5SNdoFKQg6RQMFS9qhmCaEnyA4gQ2NGvXOsu2V3uHPr7SQseFcnLUIvg7BRma8PUuYuBKWmwADpWhVh7ru5qeBgzhvRhFPVwwdd5fqqcsfjj+FqrbO/pboZ9aC6+EBmqZGNR3F/WAYrE3BGLhH2bRRW2q+AXLFvE0O7/KvtL4aUGhHZRlZ6IyKYgbTNLLQL69TQhGLS/aTrTFXd/+XUSpS/SnZIX3kyZ7Gd0QcE6sQzVK2owZzqkaAZqjIgamx8PfUhGVwBzCogiGt54exQuNnpXuJdgM30ksv4DlPFh+sgSd8TKT0xo3GNdAAR+Zf2UjsAyCBAcAaNvyh4izc+LWuycGBjogffHh77LQ2+FEUCng9vMQ9e2UnHzwnPz5AtG/CtcDo8azfh3c0N52Dyg427z7GZ/Lm5zCWBIxIWFd8vIl/3dHUyPL1IBUd9NICjHW0uA1cFya2lXSV4pHhEn1jK0aVXOcuyxj1CF6DaQGCpU9zk3N/M8T3/PTXUrLcuucd37myru48XDxqSXh9IWiF6hj9GNe3DXhLqwr+WL34SxLXuWTpUm9JuPP4b+l9MIl2m1kKBsfQNPtTyLldnsiLltJXbMKBNN6DgDqYOXZRX8FelNe8wZA26RFNcOuwM0bVJG7KL/WrMh0I69/XJtHZyksR1NyseM3TJdrHcBVJUCg7ZevlpYRV8KDYa4pI0nFuWlwzL7aKla2hJ85dNa4T+W2ozMZaWci9ot50gkbLxsX+H9Opt5PJi0mhohtS1TN49b3hq/H3UrvWgkNESaHT6hc2fYLEGNCJB3GZxSucQoWN7wNNqverVdiJ7HI3l/tVCZcwACL8ZpMLF+m3BvzjpO3Zsun1eMXYhGjGwRmnc4mkfzyIXDFV4OVajMQSza4s4YSqqFYj24dUXm7ZorjsP0MdDcILonhDpeq5/8O0lWXjGHYCxt+vnF7p1NdQcuGeyjHBMHFmITDdYQZi2t708imb6PRc/OgSRh20+q5ZIQVS0Ff4lyGxgafcqa+bzzSSOcfNRZMx43GcS4hvIJn+DmvIcjXSzFuMCqHyN6IFfljAD03Z6YoZruNOBo2ZtVqxTzsZliSWuzJCp/5iyyuo6dGAf7kjMy7KSWfxlf2I+8WdGNgqwHqK1n5kbPLMIstvz4kTx9ZI+lGWwhkFUc6a+eAEG1ZZF3NhMC4kXcDAQdbPEwWp2YuMeUX2AZUZBQyTXij+hmJB8CK+koAFEFR3GKufMkkx5W/j5so8ZA7DRJjkNSsI+WIKa7ki8AfB/A/U38wjRH1IKKwRwMr4JWXq7lUXg3F0ooAvLgCQQBiQ6kBWPJcId8cpJZyPU6g2IKIFoA9XrM5eDWNUMFHau0/hJfz4Z+Hh7srlw8lzj2EopNShUeJzOpmnmPvwAK+tWN3AIv6kaiLkdTJzs5YbgNxjxKZ1xABMg/CZv6M5o2QVyvm7ARV33Ccvf1aay795b5JlCCUgZwDWvSNosfXDveBpW728Q0ir+AWYWnQl1RU4IRioxUs3I3zfwBoISqG8rflmGeMeYTQYofb+SIhHVdBQ6oPmjQLXxx6qrJAlypK0BsGPeTzpJX/RqLCx9Ia9SJtkAdWLTA51/FzYkTWaya6IyQTyxoGMXsiaNtgeQ3xbZvPXLG8OZgfh7cCnVZvUcYL8OfzQ4K6V0Z3Q3sMHwrqmlvlt4VNreg+9hsJyZxXuscIyPo42UV70ANTLA1SZ+1ksNVECugarifHLSIeT26HCll70xnXtJZKe9Te9AxmCdrYnP1csDxQQlwSARbGRG0Wc7fiE7/vEm6KJZpvxouXptgBqFmSrWom/jzCaqzvPYCCATM5RMG+KwfZx7o6FUA6hWy1G2LTM1zhMfT+VkAdgqpcfBi8r9/dE57q9gVlSUEjJchruVmHCHLQ+QFKYNqha0mZDVrmcr5qvd9q4VrXpkNA3CFJsvymbsFqcCoNFqfEW5Xt1QylmMqpcQCtsl36GoDNjrkXyMTTB+C3l/3YwageKqxqsvyHGu+miDJRI/l3z19y7Djs9/wNBdhX46zsJAMcutouoKu9VSLZFx2U0K8k73zCoB0zqNKqxUB4WS5aKli2YNySAvkhaCJ3I8IFSc6mFV8MNWp5zDSUVRnHL6zPmaq+axJsfsOU5lda5d1bABea2DmXUohubyzAdNMzR0p+ZE44o4w+kdUI4NVgh7SrK0CwlvSOdphCvUgPc86NBcGtgKxNaPE7erCHjWXXYAocNOXd1I0q4bFVDisIYhN6vJHg3yxlphjTNVjBGzMcaMC/Pbscl3Dj9rU7BTpu7qZ8cNbubZeWCOliucff7g5Lx71nKi5YU8+pxWbmspZui5hY47fKwQasiEkJLdtOe//XoBUESvEuEQDSXIkVl6W4mxzG5rphZfoycvjhSa5FfDZHgdZ9rWfFaFHbkEfDGgEbtS6+aJW31H3aPO7tbgKONmgbfXGWheNCAA2Vg/V3knr2dyYA6mqSM5qt4egtpqhGzvoc7OLNnfr9KA6jAf2iKg4FYqZ41D9bE+dYYCSCy+5JOCSIa3K5S9TdyxH9z4Jub4Ehloop3byWX/C9YB/NTQqGcT5jXvgojHACxT07+yvGbbnkCZ5YpeM+VD93nEBCS9EY7lJ4DBXGHjBn7RZu0ZHkI8TcmHqCmcQ7VW3qrCR1abY9T7V0GyWOZFCO/l/obqWRFGYkzR7E7yJ2i9Hy6DNB1k4HOpZkTWkA4Qt/TuQap7Wm60nO/AiyWctGT/Qn+SD8NYFbFMGF35OeRsH9t5qL2U69cq0OnDgapIjDrrOlPEoGlSYiDB0Mt8VukYIKwOMKLjOEu1hayTTtbWs1GiwsnJQTjGfBKbDTfvdh5aVuyUqImH2IVH3iMl+Qr6AkyBCNiJ5dYzKtmkAvBEZw8Ppu1H63RsIgr0cQHNW2N8mgqTuaeLOKrnhK/XynrWbwmkXQzTRzmUII8sYihB8+HZO+NA7SgQAyRuz00BTsPbrbRoIw85m7mAzOIYfFKL0F91oI2LdKqWhfXad0xyA49ahVnohm5hGzzqujw5gAAEj3e0+UN3KHrouH556y2LquwTqHJWHADIeC3nfAqofxsN5UUD8FQzQn2EeH2eKkXmhfENtYc4CLjMbV4UJW2oz5e+X9sYu3psOCT09Hs9/JdiARJ8TkjzdAwcuk4ZClDUy9S42o7mfIoFuRrszbQdK/E3/YmAffLDgYztnilMAB67bVdEUsi0mo2OIerkjYaKEovMZxWnfWHvE8xPRW0VsHxzkRByef6kfVxGlpze7y0cpKQg8S4hTH+UGTtoFdQ6JYRrmXcKI+exIvuGDurBU5ucO6fvGqleHBd//ZrEYx9709MZjTQ0AplWtFV9sGTH40Q8M584JWhDXHpQJg9TkBOXpHrMGZZrCx47YkA2Lau5m+WnzChaZGxUqGmPx2XlZLVUyw7YKnQhk3HLGhgizpCVWES3FgbqhxorMHFTVpU49cW8R/8dGxJoYIMUd3C/Wz8XTeFeWfM8kPGDl3UEiNGLtmlFBny+KzuvhCMzqucnmVYKXxlgAkUFiQueVh4/Ytzt/n4/TsrBJZpfH/c5NsXpqi2eBBwcCon4Xj4+V/U5aCVnNDPXgLh/vV/zFMvc6RqPIBJ54mjWKurVUsG9tXRXQgCeP+pCVobmCdVTLG5gNF/8km+QpUheZ7t3qtP8Ot+ZbK7IlZtXVC8GXmIfukZJSAgR0Cmdwy3vRuPmJ9j8++yT1aDpYe5maVr1PN80+364doOzxSrn1neKRcFntiK8hB2bX8G8UIokerhVuX2wrn5hxnWTGM4daz8GGo14HPhgPYbwPh2sEQXtXMF7/bCI1yUcRgh1T1HX1dSmwdwAD6AO1zeqRVzxKqfqsJXNO+fWClMViO2bNIA0bYTR+162hIJcmWw0ED/gK36yJbxCgOptqPaZLWqdTF974YcRA3p0D3sJcQGLqM6rWCk8UKHarV2W5zRr1AtXArLNvfr7JQRt/uTZl0Du0AkJM6z/l9JltPAYFliSaUgeJczFdr1AhUP2DCp6jaI6NIpHhAXshBc45psp37UfEIsZveVuXRcGow7mtvaYrWfGsqe38sd418BW3w7eHI0nzS2UwJDzojPz6oyzuIkU3UWMrp+UnHm+kj8K+pEQ7Om8XF5U2/3/z9bdif20CLCea4/gO2CqrxUhQemKybXLuKbUF9J1+CFWsgpB9Zr9FpadwvD1Un13mjBXO5+9Df7YYKVB4jnKB7SuA4MQ1gz5Z1ocQQnA2E4Po0QSORQJ15MJCs+4/NU7fNoy3vqzOBk7R+YAwejNKKgbN5nXAD2khe50AQFYWbtZAZOxVPVAGKStIruQLjUT8Gpkvqa2Uzl24jh/frYejgy8zz6Is7QuAp7PKaUS6MbO0SOCK3Oja7bCy/WlrJBPDLCWz5VrgY0WU5CbbjJg5eMOm1ULEXDpIs2pe8Us2hZVgeMD8qkFqHWBeRg8oWvAXWAaNAicC1eXtR2Vyacqxzv5971LAWXVlKjbyp7rrdAS1HZ/wvPOlYKaYJal24T7UfHseVnPInl5s2SakAnYggohvOTkqqQefXMNaJHRzE2NiKfjQub2Y74Bgf4iMCuRKuEJj1ZlYugxUewy4Y/tDKZBVvyOg9quPihhZORpbjLvLCRn0dQ8LXHDtL3oZZOhWBiO3ARt0TJuCAuy1iStU9fhpMt/37BR2fYDcrhtG/CZgLaDuU+b8Nd46VCxksp0mJ7LS8k9WCXCkCHpI4a9eVkVzUZPCU/dIm+A9i7NSz6pjL6p2aH9jag5q3O94XMJtUEwpW4kMbiJjlfw1wyUcf4osyqt/LIiwC1SqfO++dmGe1FOCPROP59yySvMrcICAj83GssLamoT/59NYNRZDFXnsd2O0uKMn0Cerov6t3Y8/R909hLl5M/X9nrQ0JDJ3RAworCM/V89MCTnwqxXVo+BLlw2/T0t68d6o7w24T1CHchc6Xa8MXsDFANPq8H3hTPigPpBFGWnX7xovWEEz9/oY+arCV7GquoNcyKyApoAxfkcl8LVmKK1h13PzNXb7R3kfAnEoRlS4de/xb3jMKZKu49uQ0936tYBOryZ85VEKU/GtYD2xme+vVMRyeF4q/i8xEvuVoA//X8ikC7xCxC0R7xtKQIQLrDldKtMMJenDUsQ3f2Sfg3zzWYFXrnposb8nagL/3hSu3Y/BW1dKuTeP+39thhF4pDP+KqCLfQW0Bbug+G2y1lE3hI09Az1KXuamW8CaFGfIFIaUPxSg1l8RsCL+nj/w4nuzsBEIYz6wzbsg7I6QqXxWR/YN3Gy86EqtLyVIE13jo5xY0r5IEdm5Vv5tpfQys3ulnX1LiJ854Djpb2LVrUsPtcqZLPVKnhZzGnqNreOcS0873j36bA/BC5JIcsLtamgqB7QFvC1XebY34E3QGx43za6QVABj2pN4VFJlA72OO2bcZo3+s5s9bendsaHMNkc4qSxBvassZBpXWZaVq1seT1Gs3CT61zcKU1AjZm0HLjt/pBKSjs5Uo48R3x5cwZTKlBnym+l+IJ1QDU24ss/hED3O6zpVN9I8pKHzFxylPuVkUIxutqdEWE0REtq5hrVy5kprP57az0i6vmTzh0ad3GRyRvftJfPq1RgZJ0T3ygTnuFTeBk4QNXPoNSSvOT+bb4fveips2cJgcU/vGHbKz58osUK1o57eXZ3MPf5MmcDrWRMTsFYWyoq/fr31e4xV4JCIbxX85SpkSxmBvQXY9e644unaDgPxnuq7Yp28znozWtVUhlndUeRfUalr3QWVnJUzPC1NZsrOufBvrxKgEdckogMQbiZDfBae6ik3EELcTwlH+n3qvBoyJE3YG9CB6ECKGz1gVp3k58rNkAy8HiOGzQvPJggOF/O3fZAU3IQQwQJO17rDldX4Uotexu3bsvl5ZXV9aGZ9OfQ5Ye6IAQ+XWGvDeN9eCi8P1+jKdWOlDPeYSb7auLuk6Iu1AXLVevzFnPuILKTRZ7l1Z7AO3xlpUXGf7YcOxEIDxJ4H/AFCY5o9XKyEAy1VsZaMMQV4a3rQa/Lb4jcAQm/KKjPjdzrYwTPkhHg7fJ8SDiQmq7TRRkDG7k2KG/JEJGHwGIOM5RcxLeah3vYLlTUyEov/QkmPKxXE02GJudbe1IuoywS3q2uwvHGdE9/KQw0t8Bu1buK8OsdSd//fbbAWqnzfdblcZjS+9ls+NFREvCaD2gqcPTiX9+p7HM/aS11m+MCt6vlKa+bXwXdu/Gm64PFsbWNpP+OWXTJKqoR3Bi2GZJSAlk9R1gvv1eN63sFwyNofwWYNqss6rsO9cDxz1IVPvrfvJnGXdj9YmLEdVN1dsIVAYGiw0cAUi3k8tp+36xhLJ3lzoC8/8dWw/x+Pgk1EV6YQagqi3LAzxfgPQTj8VQzxQv/NioAYRUmLTcDEeDSFnNrq5NIG8XXhceprJK5MYt+SIaLftItLLMX/M67FN9Z8BLdQKjEmLZf1EElNyL28BTX6VbHSn6rVGQ3uDzUGa8NBGNtC4yiHVQmq0RHQWTlYJc76b3jLCbDMA7RuoEXgxuFFPKHFenf6lvAyDLlYOQDQKAyWeN3S3BGU2XPgMkQh3WNw2Nc3+/1Ujj9Oyh8+SEAQ++MUbVBZ0dqQVgyoL+STtOOq6311iH/5aU8ZcsWi93S6rSeJXeBc7wujR1XwwVY4hb/prhSXHlYoAkC4OBXW/LPpiiGFgQXknClbbEEfL8zoqJGKenR3dKC20Slk5aEL9fZfUOYXJq75zDP9bxp0REdZhPqXM+Y9mR+l9/mACdwy/WuqiC24h1RitRBLH6tAKOr39i3sD7cUhFipi/HvAQ5cgMUS3Z6gMcCR553Os5q5ARb1vHgDL89jLNcej8/fI/SWAev2OUA7QXdwrsdOTpSt695wcba0fT/letjmDoSTjIQ9QvGKp0HH1APmYlZilBuXLXyWCxn0jcSKtiFOTzIINjYuX3j1BKHBPyr94vVgPMtDkjMEDl/AthpXcyEFGwYTbo9nncHkXoRVFmw/GBpOCgdUuTfSnV4OrLr/9g0HHy8jB3oD8l1gSZ8yMsjI6kPNMKb35iRe1QY3sRMemC/8Za2MrymgxV+w/kU3jh+O4iPDf4TE58WenkPXq11TIa4f88eTWwFbnoebwYYdGbn8QRFpjMgmtFFymVllmhLBVAXj0VDQc64tyEIAkpqE9eprxYAGwjn1qJxTI9jute5Gs7rglT2cbL1i3ZXbvqlFsTny+z/ENVLjEt2RKC7GMDhFLtbckElY2HCoh+kaoVRMFaMcQ597NUHB61xkOdUoHMIzgAzFGtyfGSVr53iocMVNxktwew7l3A0A1plUF/2H3NHj9Od4ItDy67H+Z/uGqsp45hN1Z4brAHVZ9062gIesoemaITM48PZUUhO9WkStn7myTceCjJoAnx1s3RAF6tcDEeS+4PtmlX2Jlo9DobLuFAWj4hytz/nXYNJq0Qcyl1tJB1205vNtp9ZiQWWRhp+Y4ADsVwsmw8rSf/4MNm3BUqPJNqj/eH1gcEzPynKaG+zjtF3rOhf8Iki8RRC2cJAGUM8U464lWOOon32gRFjBYbXieiIY82S8hZkExqkzIqwy+MZI04laV3VoVW1fmYwnqYzVCsJGV3q8bmsZBMbj8JLUoesZ8A3IPCzTWZ51lfLuHCYKgMZb/Bi23Pyd6flj3vTUSmKvypMNjTEA457vE6ignRPjCHukbUFGrDUhUvEHGvMbOMgAAAAAAAAAAAA=" data-mce-paste="true" width="240" height="205"></p>

<p>1 reactor, 2 heat up modules</p>

<h3>Flexibility and Ease-of-Use</h3>

<p>The Firebird™ with its robust yet flexible reactor design delivers uncompromised process performance with seamless wafer size transition capability all the way up to 300mm.</p>

<h3>Cost per Wafer Advantage</h3>

<p>With its long campaigns and enhanced serviceability, Firebird™ meets and exceeds your cost-of-ownership requirements from small batch pre-production evaluation all the way to ramped-up production. Providing throughputs up to 40,000 wafers a month (based on 100 nm Al2O3 thickness), the Firebird™ combines best-in-class productivity, superior film performance and low cost of operation, leading to higher profitability for the most demanding customers.</p>

Book a Live or Virtual Demo

See the capabilities of our partners' equipment - including EVG, scia Systems, Veeco, PPS and SSI - in action. Experience tailored demonstrations designed around your process and application needs.