AL76 Compact for Packaging Applications
The Alpha Plasma System AL 76 is a high-performance, industrial-grade microwave plasma system that excels in surface treatment and adhesion optimisation across multiple industries. Its robust construction, versatile processing capabilities, and modular enhancements make it a powerful solution for large-scale manufacturing, prototyping, and R&D workflows.
Key Features:
Versatile Surface Treatment
- Ideal for comprehensive surface cleaning and modification—converts surfaces from hydrophobic to hydrophilic and vice versa via plasma polymerisation.
- Enhances adhesion for bonding and welding across virtually any substrate.
Wide-Ranging Industrial Applications
Offers reliable performance for high-tech sectors including:
- Medical devices
- Flat-panel displays
- New-energy battery systems
- Automotive manufacturing
- Solar cell production
- Rubber, plastic, and metal pretreatment
Technical Data:
- Process chamber: Aluminum
- Volume: 76 liters
- Chamber size: W 400 mm × D 490 mm × H 400 mm
- Chamber door: Drawer-type with viewing port
- Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
- Options:
- Vacuum pump
- Gas Channel
- Rotary table
- ECR set-up
- Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
- Dimensions: W 770 mm × D 780 mm ×H 780 mm (incl. light tower)
Applications:
- Semiconductor & Microelectronics Wafer cleaning, resist residue removal, pre-coat/bond surface prep.
- MEMS & Sensors Cleaning/activation of microstructures, surface prep for bonding/encapsulation.
- LED / OptoelectronicS LED wafer cleaning, substrate preparation for optics or packaging.
- Advanced Packaging Surface treatment prior to flip-chip, underfill, wire bond attach, encapsulation.
- Photonics & Optics Cleaning and activation of optical substrates, sensor packaging.