Ion Implanter Decontamination

A specialist end-to-end decontamination service you can rely on

Decontaminating an ion implanter tool safely and effectively requires decades of specialist knowledge, experience and training.

Our trusted team of decontamination specialists has been decontaminating complex semiconductor tools since 1991 and supports every single step of your project, from removal and cleaning to reassembly.

A trusted partner to the semiconductor industry
30+ years working with ion implanters
Cleanroom move specialist

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	Removal and cleaning of process module assemblies
	Scrubbing of chambers with diamond-encrusted scrubbing pads and deionized water (DI)
	Full tool wipe down with DI and isopropyl alcohol (IPA)

	Area sampling and swipe testing to ensure toxins are sufficiently removed
	Assembly replacement
	Full beamline rebuild

Additional services, if required:

Consumable replacements
Crate manufacture and export packing (in line with SEMI packing standards)
Equipment moves
Equipment installations
Equipment power-up and final testing

30+ years of semiconductor experience

From implanters to lithography, we've specialised in working with complex semiconductor tools in fabs across the globe since 1991.

End-to-end supplier

We're the only supplier globally that can support every single part of your project, from decontamination to transportation and installation.

Watertight methodology

Our highly successful decontamination methodology ensures every job is completed safely, correctly, and to legislated standards.

Trusted by Axcelis, Applied Materials, Varian and more

We’ve been working with prestigious OEMs and end-users in the semiconductor industry since 1991, and have extensive experience decontaminating ion implanters in cleanrooms, labs and production facilities worldwide.

IES’s decontamination service has been outstanding and the professionalism of the team has been exceptional.

Find out how we decontaminated several ion implanters for a US-based client and supported them with overseas transport and installation at their new European fab.

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A Specialist End-to-End Ion Implanter Decontamination Service You Can Rely On

Whether you need to decontaminate just one ion implanter or a whole fleet, our trusted team of specialists can support every part of your project, from disassembly and cleaning to reassembly and testing.

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