scia Multi 680

The scia Multi 680 is engineered for periodic multilayer coatings on curved substrates. Offering superior process performance across multiple 100-layer periods, it enables the deposition of high-precision, homogeneous, or gradient films. With automatic sample loading and a separate load lock, the system ensures extremely short loading times and delivers high throughput for efficient production.

Key features:

• Homogeneous or gradient films on curved substrates by synchronized orbital and spin rotation
• Up to 7 magnetrons, each with separate housing for individual gas supply and defined particle emission profile
• Optional pretreatment with additional ion beam source
• Carrier based handling system with load lock and two independent substrate positions
• Substrate face-down orientation for minimized particle load