Series 3000 LV 600/700

The Series 3000 LV 600/700 is a modular parylene coating system designed for scalable production environments. It features a two-part configuration, comprising a chamber module and an evaporator module, allowing for flexible setup and maintenance. This system is ideal for applications requiring high throughput and consistent coating quality.

Key Features:

• Scalable, modular design is ideal for high-throughput industrial operations, offering flexibility in configuration and maintenance.
• Large chamber volumes and dimensions accommodate substantial batch processes or oversized components.
• Integrated high-power plasma ensures superior surface activation—key for consistent and durable parylene coating.
• Multi-gas channel capability supports process versatility for complex coating recipes.
• Sophisticated cooling, vacuum, and electrical infrastructure reinforce reliability and operational efficiency.

Technical Data:

• Dimensions: L: 2400mm W: 960 H: 1460mm
• Weight: ~ 350 KG
• Volume: 600 / 700 Liter
• Process chamber: 800mm Ø H: 1100mm (600 Liter) / 1300mm (700 Liter)
• Plasma source: 2,45GHz, 1200 Watt
• Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3
  channels possible
• Cooling system: 8 liter (electromechanical Cool-trap)
• Vacuum connection: DIN 63 ISO-KF
• Venting: electromagnetic solenoid valve
• Pump system: 75m³/h
• Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW