Series 3000 Cleanroom System

With modular assembly and variable chamber sizes, this system adapts seamlessly to your process needs. A wide range of options—such as turntables and specialized substrate holders—offers maximum versatility. Designed for cleanroom environments, it enables loading from the cleanroom and unloading via an airlock door into the gray room for efficient, contamination-free workflows.

Key Features:

Cleanroom-Ready Design for Controlled Environments

Specifically engineered for applications that must adhere to stringent cleanliness standards, this system ensures compatibility with cleanroom protocols and contamination-sensitive processes. 

Modular System Architecture with Customizable Chamber Sizes

eaturing a modular assembly, the Cleanroom System offers flexibility in chamber configuration—supporting tailored volume requirements and seamless integration within production lines. 

Comprehensive Customization Options

Designed to accommodate a variety of operational needs, the series supports numerous add-ons such as turntables, different chamber geometries, and other bespoke modifications to align with specific coating workflows. 

In-House Design & Manufacturing for High-Quality Assurance Plasma Parylene Systems develops both hardware and coating processes entirely in-house, enabling precise customization and consistent quality from system design to execution.

Technical Data:

• Dimensions: L: 2095mm W: 800 H: 1450mm
• Weight: ~ 300 KG
• Volume: 140 / 200 / 300 / 800 litres
• Process chamber: 500mm Ø H: 700mm (140 Liter), 600mm Ø / H: 700mm (200 Liter), 700mm Ø, H: 800mm (300 Liter)
• Plasma source: 2,45GHz, 1200 Watt
• Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
• Cooling system: 8 liter (electromechanical Cool-trap)
• Vacuum connection: DIN 40 ISO-KF
• Venting: electromagnetic solenoid valve
• Pump system: 75m³/h
• Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW