Q240S

The Q 240S is a compact and streamlined variant of the flagship Q-series plasma systems. It retains the same generous chamber diameter, while featuring a reduced depth—making it an excellent choice for labs and production lines where space efficiency is critical. 

Key Features:

Optimized Footprint

• Shares the larger Q-series chamber diameter but with a shallower design, delivering high processing capability in a smaller overall unit. 

Space-Savvy Dimensions & Weight

• Dimensions (L × W × H): 620 × 550 × 500 mm
• Weight: 75 kg, significantly lighter than its full-depth counterpart.

Technical Data:

• Dimensions: L: 620mm W: 550mm H: 500mm
• Weight: 75 KG
• Volume: 9 Liter
• Process chamber: Quarzglas, 240mm Ø , B: 244mm
• Microwave output: 2,45 GHz / 50 - 1200 Watt
• Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
• Substrate holder (optional): aluminium, custom design possible
• Vacuum connection: DN 40 ISO-KF
• Venting: electromagnetic solenoid valve
• Pump system: up to 25m³/h
• Chamber door: you can choose between hinged-type with viewing port and drawer door with attached support rods
• Wafer size: up to 150mm, at a number of 25 wafers