Plasma Cleaning and Polymerization Tool (cluster system)

The Plasma Cleaning and Polymerization Tool (Cluster System) is a robotic-powered, multi-chamber system designed for complex coating processes in a low-pressure environment. It offers precise surface treatment capabilities suitable for advanced applications requiring high throughput and flexibility. The system's modular design allows for customization to meet specific process requirements.

Key Features:

Seamless Automation and Process Continuity

• The robotic-driven cluster layout allows seamless transitions between cleaning, polymerization, and coating stages—without breaking vacuum—facilitating high-throughput and contamination-minimized workflows.

Versatile Plasma Processing

• The availability of dual-frequency plasma systems enables fine-tuned surface treatment or coating processes tailored to different substrate materials and deposition goals.

Precision Control Over Gas and Process Parameters

• With up to nine gas channels and configurable substrate holders, the system supports advanced, multi-step process sequences and parameter optimization across chambers.

Efficient Substrate Handling with Vacuum Integrity

• The air-lock robot ensures smooth loading and unloading of substrates, protecting delicate coatings or surfaces from contamination and throughput delays.

Robust Vacuum Architecture for Reliable Operation

• Multiple pumps and established vacuum interfaces contribute to steady vacuum maintenance—critical for low-pressure plasma and parylene-based applications.

Technical Data:

• Dimensions: L: 2000mm W: 1800mm H: 2000mm
• Weight: ~ 320 KG
• Volume: 50 litres
• 3 process chambers: VA L:300 W:300 H:300
• Plasma source: 2,45 GHz, 1200 Watt / 13,56 MHz, 600 Watt
• Inclusive: 3x3 gas channels (gas distribution system inside the process chamber)
• Additionally: air lock robot, example substrate holder for air lock
• Substrate holder (optional): Aluminum, customized design possible
• Vacuum connection: DN 63 ISO-KF
• Venting: electromagnetic solenoid valve
• 3 Pump systems: 40m³/h
• Chamber door: Maintenance chamber doors