HERCULES NIL

The HERCULES® NIL 200mm system is the industry standard for high-volume nanoimprint lithography, combining EVG’s proprietary SmartNIL™ imprinting technology with essential pre-processing steps, including cleaning, resist coating, and baking. Built on a modular platform, the system offers tunable configurations that maximize throughput while maintaining a low footprint, providing the most cost-effective solution for large-scale production. Equipped with advanced handling systems, the HERCULES® NIL 200mm delivers highly efficient processing on a 200mm platform. The system also includes the capability to fabricate multiple-use soft stamps, a critical element for high-volume production, without requiring additional equipment for imprint stamp manufacturing. Supporting a wide range of applications, including optical devices for AR/VR headsets, 3D sensors, biomedical devices, nanophotonics, plasmonics, and metasurfaces, the HERCULES® NIL provides a complete NIL solution for high-volume manufacturing. With its innovative design and robust capabilities, the HERCULES® NIL strengthens EVG’s leadership in full-area NIL equipment solutions for next-generation technologies.

Features

• Volume manufacturing of structures down to 40 nm* and smaller
• Combines pre-processing (clean / coat / bake / chill) and SmartNIL®
• Volume-proven imprinting technology with superior replication fidelity
• Fully automated imprinting and controlled low-force detachment for maximum working stamp reusability
• Includes working stamp manufacturing capability
• Fastest curing times due to high-power light source
• Optimized modular platform for high throughput *resolution dependent on process and template