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Whether you’re moving a single piece of equipment or an entire production line, our trusted team of engineers can support every step of your move, from rigging to end-to-end relocation support across the globe.

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Firebird

<p>Veeco Firebird batch ALD system is an innovative, fully automated solution for high volume production of pinhole-free oxide layers for deposition of dielectrics, passivation, encapsulation, and seed layers films. Built on the proven Phoenix ALD system, the Firebird’s unique modular architecture decouples substrate heat-up and cool-down and mitigates wafer breakage with its innovative batch transfer design – a unique advantage for customers using fragile wafers such as LTO, LNO, and Glass. Capable of handling 100, 150, 200, & 300mm wafers, the Firebird couples unmatched flexibility and performance at the lowest cost-of-ownership.</p>

<h3>Features<h3>

<ul><li>Batch deposition of oxide films for seed layers, encapsulation & barrier layers, optical coatings</li><li>Effective parallel processing for best-in-class throughput</li><li>Decoupled thermal management for preheat and cool-down</li><li>Zero-wafer handling at elevated temperature for fragile / temperature sensitive substrates (glass, quartz, LNO/LTO, GaN)</li><li>Flexible and upgradable modular configurability</li><li>Seamless wafer scalability (100 to 300mm)</li><li>SECS/GEM equipment communication</li><li>SEMI S2 compliance</li><li>Veeco worldwide sales, service and support </li></ul>

<h3>Configurability advantage</h3>

<p>The modular system configuration can be effectively tailored to minimize process flow bottlenecks and offers outstanding processing flexibility.</p>

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TXx+oQiNQsB8dwTbaCPS0ypR6m1xs6cHLy2dCYN/4+aieZp3YaQY4c912G/yKtXAS/TsTg/BMJnVWeQk6aiTf6CzV4s7lcyyU6zVkuNlUSFn3f843L17g7WqaO5qeUWcJLjFhfhjg4E+9O36gfzdTF0iVeEemnYr4iaWWKHghdS6w+0Wto2ebD6x0WNV9xBezUaiHj77JC+qsSRRy+7lKIVMMsjXuXPse8B3m7G7EXEQPqnqSNLRllNTRf+bdHXLpVX4S1o0BKfvmiipnVXekjeE5Qi/gB9JSTIkaeEcQEO/P4IB5J+zZnqLGzGhtgHYng/vn2W62aJEUjYssawsQXu7VBVMr92u7ReqLXHRYp4ZeTX4g74ZIpX5JLgbDmVKtUp2uTyx5rQRLVhnZ0QoMJOVkdW/NsAATgAjc9Mw108FXjJvVfts4sBkzj1Q/ygij/z4H7gkDQ0YiRmXVnRw0QJey879W8NetI0zoILPhOlc/Nq0ov6YP7bglDI1y2XuqOArlT+Z0mcsA54gl9c12vCKfa1dTYF/okNWI2O/3SlAWHb4EvhwRgYlkfYsXgQq9Bx4H2KnCKbPKMfsEMy34eI9RZd/v4x/3lbTKcCVg49Oo8Z//XeBlaOlycWEYu97jMt4Es1zXZCaTpBluJEKQx5whL2GAMrMSv59yVCvLD1ncGKr4u1XfpkyVi0AIhmgnKIm7Y9Jlawor0msotxGhKgEboX/rkJlVKeX+AtJZdTeI2eahgO26Hxb2Q0R6AinnGHwioff+zz+x0hKpR8HlXtIOqRwc5Ylc7coLe9tqUiuC9epbrnIbmzGR4+jBUq+GBfI/bguy1bFvp7woO5uF0bLz2bIsHRgInF9rJv24Njusn6ZjX5QDYEB4E/Wl5dRx/+hQX/OfH7n1jSBfA3f0oFuNXDl20U4/jBHBrhTqQS64/BpO8zJp/CUjL09QwB7WIutGWS/cWGRRy1DshgR1m/92GCsKhUyse+q3oosbtmk9ZzT/+1+RyCkFDiI5ZKW5zgdfazlKo4vD0GSiSHudiZ/+EdGXo++tTuQb7pt1LooreHLV/X2iRo49vyi9lMHPBwDrehdjXEklG+8NYdFkP/7+TdFKATCbu27ZWRGqdAomUvxTJ6kOXvVr4fr4kFTDm93IfbLYveJtpNtWOv6uu9WJQSajWzV0o1mtOzBOLWQdyOyQ4UygYDwAIEGQxuq1rY+tcxuEoZRu/4hF+j8DPf9Mda7uOxMB3UbZ77cxWGoMtGD/+xzwCWalYa8f/B7fssJ3iRW1DKfrA4/LNLwJjiNP4ijTNSDKITD3nMHjLh9wqa+u6Z2QMXu9uEwHfF3Jc4jFXsBS97vBvYka4bHibK/f1jSZwWdNnnMX9CymlUtxXChAWhVPtpd/Y9+Q7+DJU/JyS+APumUtEGVLoRHM9znRxS6tR8NZWuiXvHL1DR0VSC3M33ujaA5ANrdXHUFYDopwTm561GgLntDVZDWIeQl460ecl0fiNDEOwJ9T1sxujJbHQzhy/oUmfEg0DSc2Lur1sjgLQ8cAHce2j4c6d6xVWRkgYFlqqpRo5AOUW4FO+YHesBDx3QENH849Vi67mGbq6qz0THcVDIAz7gV9LOhlFANBdpnr3CVTbPSWz3K9zOq/psV2Ifxzjrd1hZr5inF+9y0Dy0RplbFdSX1fTsvSAWi3L+sz8XPnLOTM4EqgkpJo3v9iTsZcglpdy/MAc5LKzUEkD6cX8vrwfoPtpxYQ/DcQJF89nwHDrV5VC1akVFHZx5dhxlsov49nRSEbNMfycU1tL0RmdxCcBKrgTiVP+VAnFce2tKQtqT0CzFn1mwNBJ5s5VjeRHmi0tk9EoRopaVybL6b6mQfdzgQyXjmO2E80Asz45Q0MnlAQaXJoWPMdPo79dRtqh8Gpa7no+W+Lj3GSLkgOE0AOg7wO8FslKtzGuGLFpqjTnNGiUEExZbhE3DgFORRrntCS9FupJQj0bZKLtmEHF4x+oS7nrsYAEyV0Ivh0HwoBWpPgUwQcXzdZr1gWhyYWAefsM18fFPss5pTpmR7XTvycJ6xbfpvOiitQLwQWjzxG2jF1H6WXCkOZAMtrdP4aE3dVfa6T6mMltlM8KJScdpkPqrCEZnL6Qhv/xvMsbd3FIxS3AqMmeKl5z7URwhQYD39VWnuRnIN7OEizmMf+u9eEDinGAt49BWqsC8Vs/GiXtjJgfUfanb1QWsVxss846V2hXAd+5oGvmPRe1J0gY1JDvlV5gnkXgiISFrqNGPYBmX/J/k/AA0PK5vrzAtkMokWH4U7+OjiIDvjzzTmvQo1fFzj8XhV/3fvf5YGqeFnCbf1V/WwhxarxuclnE7PnMyQ25FOoGMMAc2H/RA2VlLMKLpoal1NO5DBDaz1totOHPrLXsL2heAA6+YouYjDTFoPYdxEpaq9I27/PwWqXW7MfP4bSX0cLcMkKsfStGoY51cXHgLuhOIGiIRD8Z/cyb8+VffxQCy8c0qRTp7u72FeTQYmZftpbCs1a9qLmb+4EKFq3rDLSsrThXWYGq19Hz0hEBvX5XzQSOMENM0HNVSfL6QyNG4Ulj4gAC70CYYAm9JRtVg8cHDr9jZCQreAsPutAcZkOm4tOzEVS3vHivfLKq6cUjDDYd/JnYL3RKZ3SYAnTNYBNk2qD+BCwm4B2Mkojz/frJCQUSTT7IbixHNITAgEjKBKV6D20Tcegvi5E9DJR4XNvp2p893ImDBOGaXDCoh6aonNswD/jO7T7EnYSDDLJxMLctsO29uNY3PLtGXUEFD8FsV2g1hkbNEunBS2Ub9u5rKnvYf9vRCBX/UWgpTwJchMOgGwktCmToGn/gd4WP4Hb69TioJB7L3xojKGDjD1mqf5m1tNy7XSeMAVslOrFGSOaANkW1pP+mpljWcYPBK/2lqliOHB9MnneBl3ULYVi1fS4TZWbzurlVuEQ9LqOzUT+JrUrUlWMe/Mdt/AU0BfEw4i/fi/fkp0v7B4UkeJhOtdGv/FERhY9D58K28BbLmj4DK9UTSY9plkJYznCEP7fT/slXBv6s3F0BXqTuSWSeTylO/kvCk/8iPyp7KgWK0FIo0OqUTslG+vYIWoA1ZcjtsJOdadWyaqMgT+4YcHENm8jd5eBgd4vQuOVhSYpmUhFdkmVmpoE46RRg7iktIr301N9j5gNjoSKPNZltf/AB8n/RoylAVHeEAjhwvWTI1Z7Zn7EZzObSqtHwIbQPKpluZCDpy9qigKvQNtjA7fMSl0fwOsWkIRejtm1lxvy4gbjYUb6oshTu9roxP0NLpMzDC2vUm2F9Aub22j6iup6AlbzwxXqRFowjXVoXOGiY7yimiPr49wLi4l/a88EDd7TOPskGTDn1smgDRcJ3P35KiKrODL87LNGUeKct6uBMsUOOCp5dDMZH0lkaGzGPQdlP8IEOfcAdStbMlQlyjEgWfsXP9oB/5Jof85Cg0p0pjPZ6rCyfifsM5217Jxz2MHYYbTYZwBS8puSBDAQ2+emFsS1gMNXa1hM05hj8wUh5KkvhjM8fpX7F3RCb24w8n3upfCr4ECLxU/cVDyX/xe2SmE5VpfNWfmDKNsjw2/Zm83s+0oX802moRaGwIXsnsM1Kt9bTII5awzWbD3Ex5SiIZ1v7ESt6vsLcjQpW9+0BpwVHTvPZ1FiBVOX7cBtc34IS3sM24S7Ulnw1kjIopZhWPxSEk0kbwtL06r5NdsVlW8NrCBbOsQ8J1MUW0bUAEVBWFLVdLim1YVay/LmmcMZQH2lU2lcBM2ZlqUj4/Fay26ck5m8PL+YSbBtlyfX4VAG9J5Uv8IEJdyf1CahZXXvjdhxrubP/0lRNvYlw8QD28laUcnW1+awt3Pq55+cYOAsbTZdLirEgL06pXZo5CXBh7hwqavVVNQZ63D8Dg+LWh10YVmH7it5ypVhslJ0LBC/nGckcE8Qo7P+W6dt6ze1kvfDTAJ0WRess8rjUbA4YLHElFS+fifBSzxLI+zsf+1d9/zLTsi1FsxOCv9YeWceJgbW4CAEKT6QuqkcNSC0gmVKQdIk6B+pc3d8Dd2frQO4deirKAqTXkUU4KBZZVF3s6rqt14wmdq4Jga097zMrlmhbsYf2x2j24EkwgTr8iLZe9hlsk3eaDjs1MlBz5pul1LLo9W36TX2y5YhrkPLuFpPqe/6Ou+CKmjyUA8nzwN38CQA2Buny+Yl/qyxd/twZeahoJe06ycaTfpkyw5QM5c0JXwjLOjHuIF8fItZQerX8WA+O+tm1v84/LTKiBDoajf5x/yHZu220MBwUkjbEddWcEdA3dwwoOWKwnMry1wxXcMQPPPcHRhFB/EGKmBKSlaw+viEgyqG5+O1CxlgZfmhXwYhxHtv80kjqzwOsXNnb0Q+aq0t6VqNY0L+gX+LluHwe99CJQRfn7GjTnexYMoru8t4Zt0TZRwSbcDZXwS0UgXo7ETiF1DEWqVM3SqvD/JzWO4AOAXR27T3JZgd8dzT9Ms1Wgz/YHPUvYmn7hGAg1+ZvHhbDXHg6VzQhSSJ4p/7YySqJpkYV4H2DDbP8P911aUizXazgYyE/IERGNf57i/IJRw6jbwggXWOnHsTv3xqPLHK0FYFfnQAdx1Rr1Brp3uBqfVY7mk4mImb3UJEUOavGgSRGE+YCczJosn9k9xoOAI+OzGaDfdZmEUn8p3y3OnFC93qfnkdQyz+oY7/GyW2ayzqQgeV7TlECc5jRYRbKa68QThuRFGtIB9xc7PNdWLmsAZ6LBXiKei+/3lB2sQbqIcyNAeeK2FJ4+Qgpc2G7ofa21rccOGVuEKCRYUuRYxv1bVupi6Pz+icz6XzdMvOnWn2p53+rhTdF1Hk1ZV/It7UQcvKZU5f/JwOPtOQSB1w4PBaF7DU0lP4nzKiPvNgRVtrOJJsKUFUq7nXG/aktSLxsj/0CjXeIgd/RNmdybSdERW/FREgfBRl1m6K1vYjwYXlSqCNGjpedHE4NH8MijfzhE+r4y6MYfvHUEPbHe6m40o0REwwsHatDM0z4mzbRtJBpd6ueQxOHVjmk0ykdg5i0viOSqZgu16aflnLMoNNGkXBYgxBxoC2iyTHdtcfaFeGxo7Qw3TW3UKNV23sjkaft3Tn/cKjgjJ8w45vCdGvGU96/7k8UVT7pwfngOszedPcpA2xNxYfcU5XWs+9dzbuUPGkRrD4vpU9MNcgKN/dNHnJvuyXbuwfnRHvRkVPPfM7ffzCrc+XYfm8gmjQyuXmxTEPbY3HsSJmeXv/2HTqD64hFdVQ4Rd7DZdFeuBx//Q3T1OVvbyFt+KzUtt/9hoSEjYuB92S3fQI6UiHm4XF2fXFNSRR8P37uSgURmaacuRTG5VIFn/7KgXNO+xW8sB/Nr0wqv3Od0kt29c8Z6FGCHff6ASNBfHbgCXdlTJwiu4iagaBtzaqyhTOpp6w5T4i/TVN4y12D3xBexEVCRFI7npedxyDJ4it5Ri+SjL/U6SqCyR2hyicGulRP+eylgmvlr5b3tP/SM0ejwxCrn8RAgBuC2pq+w1XWKpLrtVpOv0zw6QQWentLi8vR1qd8g3kGW7sn8rpkIGxAX89CSnhSs4/2rohmXSbUgsnGusHbGg5NN4plh58TbEQrqesnlNonTuDiWyj2Oc6WOUQQTVMyse6Hkg6E3v0E/LRGvgvn21tujM85RyEYlf1AeYOCoj8ZWLdzrQzjBZM82Hk2egJu5TRGJYcHRJFg5ETj6kGw3+ajmH5gIEYR7AA1cr/RB/utsjx0Pzgg9rg55bygEdu16Pwm4YzJi3k+yD43FeB6KqJHuR/B43/N9wBx1RnlWQAFPZ7cdaaO8XdbnkYihBxngwjICDB2mmjS/eUJoQJBCJxETuTTqwuhuoj0S5Z42TBxfZatZr186g+tIfAEbiNjVEB2zVFI1XYhMJWwgva9lLhvRaNiKz4XQEZF9pHFGe6G/PzjoOVXds1VrDeXiYpbl0UBNi+SNjEEOL/Enmy/unEQf09TbH+54qgCwp9zZFn5zd9Tg7uVh+51N5cwMXLmiQiGUpcFYOb7qPx+CPbRfoNDSXphX019aywgkJTrGlpiMJUZhMAl8WxAhxB5ck5MRPBuoIH07zV2yXWfbdP7d0HBHSo0/J9sCr8uaSEPKGjCdw6vGdPPx6ejABFTiAAAA=" data-mce-paste="true"></p>

 

<p>2 reactors, 1 heat up module</p>

<p><img 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" data-mce-paste="true" width="240" height="205"></p>

<p>1 reactor, 2 heat up modules</p>

<h3>Flexibility and Ease-of-Use</h3>

<p>The Firebird™ with its robust yet flexible reactor design delivers uncompromised process performance with seamless wafer size transition capability all the way up to 300mm.</p>

<h3>Cost per Wafer Advantage</h3>

<p>With its long campaigns and enhanced serviceability, Firebird™ meets and exceeds your cost-of-ownership requirements from small batch pre-production evaluation all the way to ramped-up production. Providing throughputs up to 40,000 wafers a month (based on 100 nm Al2O3 thickness), the Firebird™ combines best-in-class productivity, superior film performance and low cost of operation, leading to higher profitability for the most demanding customers.</p>

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