EVG®7200
The EVG®7200 system utilises EVG’s advanced SmartNIL™ technology, enabling the fabrication of micro- and nanostructures with exceptional pattern fidelity and low residual layer. Exposure is driven by tunable LED lamps, allowing for the rapid solidification of a wide range of UV-curable materials, thereby improving throughput. The system ensures high yield through controlled and smooth demolding, with integrated force measurement for precision. Ideal for large-area nanostructure printing, the EVG®7200 delivers unmatched throughput, low cost of ownership, and is perfectly suited for the volume production of next-generation microfluidic and photonic devices, such as diffractive optical elements (DOEs). With its combination of high performance and cost efficiency, the EVG®7200 with SmartNIL™ technology is the optimal solution for advanced nanotechnology applications. (*Resolution is dependent on process and template.)
Features
- Volume-proven imprinting technology with superior replication fidelity
- Proprietary SmartNIL® technology with multiple-use polymer stamp technology
- Integrated imprinting, UV curing, demolding, and working stamp fabrication
- Automated cassette-to-cassette handling plus semi-automated R&D mode
- Optional top-side alignment
- Optional mini-environment
- Open platform for all commercially available imprint materials
- Scalability from R&D to production
- System housing for best process stability and reliability
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