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Move complex, business-critical equipment

Whether you’re moving a single piece of equipment or an entire production line, our trusted team of engineers can support every step of your move, from rigging to end-to-end relocation support across the globe.

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EVG®120

The EVG®120 is a fully automated, versatile resist processing tool designed to handle multiple substrate shapes and sizes up to 200 mm (8"). Its ultra-compact design, coupled with a dedicated chemistry cabinet for efficient chemical storage, enhances throughput and supports high-volume production environments. Optimised for the most demanding customer requirements, the EVG®120 delivers exceptional quality across a wide range of applications. With its focus on minimising total cost of ownership, this system ensures a cost-effective solution without compromising on performance or reliability.

  • Wafer sizes up to 200 mm
  • Ultra-compact design for minimal footprint
  • Up to 2 coat/develop chambers and 10 hot/chill plates
  • Versatile combinations of multi-functional modules for spin and spray coating, developing, bake and chill provide great opportunities in many fields of application
  • Chemistry cabinet for external storage of chemicals
  • EV Group’s proprietary OmniSpray® ultrasonic atomization technology provides unmatched process results when it comes to conformal coating of extreme topographies
  • CoverSpinTM rotating cover for low resist consumption and optimized resist coating uniformity
  • Megasonic technology for cleaning, sono-chemical processing and developing improves process efficiency and lowers the process time from hours to minutes
  • Sophisticated and field-proven robot handling with dual end-effector capability ensures continuous high throughput
  • Process technology excellence and development service
  • Multi-user concept (unlimited number of user accounts and recipes, assignable access rights, different user interface languages)
  • Smart process control and data analysis feature [Framework SW Platform] Integrated analysis features for process and machine control
  • Equipment and process performance tracking feature
  • Parallel/queueing task processing feature
  • Smart handling features
  • Occurrence and alarm analysis
  • Smart maintenance management and tracking

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