EVG®120

The EVG®120 is a fully automated, versatile resist processing tool designed to handle multiple substrate shapes and sizes up to 200 mm (8"). Its ultra-compact design, coupled with a dedicated chemistry cabinet for efficient chemical storage, enhances throughput and supports high-volume production environments. Optimised for the most demanding customer requirements, the EVG®120 delivers exceptional quality across a wide range of applications. With its focus on minimising total cost of ownership, this system ensures a cost-effective solution without compromising on performance or reliability.

• Wafer sizes up to 200 mm
• Ultra-compact design for minimal footprint
• Up to 2 coat/develop chambers and 10 hot/chill plates
• Versatile combinations of multi-functional modules for spin and spray coating, developing, bake and chill provide great opportunities in many fields of application
• Chemistry cabinet for external storage of chemicals
• EV Group’s proprietary OmniSpray® ultrasonic atomization technology provides unmatched process results when it comes to conformal coating of extreme topographies
• CoverSpinTM rotating cover for low resist consumption and optimized resist coating uniformity
• Megasonic technology for cleaning, sono-chemical processing and developing improves process efficiency and lowers the process time from hours to minutes
• Sophisticated and field-proven robot handling with dual end-effector capability ensures continuous high throughput
• Process technology excellence and development service
• Multi-user concept (unlimited number of user accounts and recipes, assignable access rights, different user interface languages)
• Smart process control and data analysis feature [Framework SW Platform] Integrated analysis features for process and machine control
• Equipment and process performance tracking feature
• Parallel/queueing task processing feature
• Smart handling features
• Occurrence and alarm analysis
• Smart maintenance management and tracking