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Move complex, business-critical equipment

Whether you’re moving a single piece of equipment or an entire production line, our trusted team of engineers can support every step of your move, from rigging to end-to-end relocation support across the globe.

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ComBond

The EVG® ComBond high-vacuum wafer bonding platform sets a new standard in EVG’s portfolio, designed to meet the growing demand for advanced integration processes. Ideal for a wide range of applications, including engineered substrates, stacked solar cells, power devices, high-end MEMS packaging, and beyond CMOS technologies, the EVG® ComBond addresses the most sophisticated bonding needs. Its modular cluster design offers exceptional flexibility, enabling customization for both R&D and high-throughput, high-volume manufacturing environments. The platform excels in bonding heterogeneous materials with different lattice constants and coefficients of thermal expansion (CTE), while its unique oxide-removal process enables the formation of electrically conductive bond interfaces. The high-vacuum technology of the EVG® ComBond also supports low-temperature bonding of metals, such as aluminum, which re-oxidize quickly in ambient environments. Void-free and particle free bond interfaces, along with exceptional bond strength, can be achieved for a broad range of material combinations, making it an ideal solution for advanced device fabrication.

Features

  • High-vacuum, aligned, covalent bonding
  • Processing in high-vacuum environment (< 5·10-8 mbar)
  • In-situ sub-micron face-to-face alignment accuracy
  • High-vacuum MEMS and optical device encapsulation
  • In-situ surface and native oxide removal
  • Superior surface properties
  • Conductive bonding
  • Room-temperature process
  • Multiple material combinations, including metals (aluminum)
  • Stress-free bond interface
  • High bond strength
  • Modular system for HVM and R&D
  • Flexible configurations up to six modules
  • Substrate size up to 200 mm
  • Fully automated

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