AL235

The Alpha Plasma System AL 235 is a robust, high-capacity aluminum-chamber plasma solution designed for enhanced ergonomics and automation in demanding R&D and production environments. It elevates the AL-series by integrating features that simplify sample handling and processing, making it ideal for medium-to-large format applications across industries like semiconductors, electronics, solar, and plastics.

Key Features:

Automated Door System

• Incorporates a motorized or automated door mechanism for more efficient, safe, and user-friendly loading and unloading of substrates. 

Adjustable Work Height

• Designed with an adjustable working surface to accommodate operators of varying heights and reduce repetitive strain, improving ergonomics and workflow. 

Large-Scale Processing Capability

• Builds on the AL-series’ reputation for handling larger substrate sizes, leveraging aluminum chamber construction for durability and effective process control.

Technical Data:

• Dimensions: L: 1200mm W: 2700mm H: 1850mm
• Weight: 380 KG
• Volume: 235 Liter
• Process chamber: L: 650 W: 650 H: 550
• Microwave output: 2,45 GHz / 1200 and 1450 Watt
• Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
• Substrate holder (optional): aluminium, custom design possible
• Vacuum connection: DN 100 ISO-K
• Venting: electromagnetic solenoid valve
• Pump system: 50 -600 m³/h process-dependent
• Chamber door: Automatic door