- Equipment Partners
- Alpha Plasma
- Plasma Etch
- AL18 Rack
AL18 Rack
The Alpha Plasma AL 18 (19-inch rack) plasma system offers a compelling blend of versatility, precision, and compactness. Its unique dual-frequency polymerization capability in a rack-mountable format makes it the go-to solution for labs and production lines requiring high-performance plasma processing without compromising on space.
Key Features:
Rack-Mount Form Factor
- Crafted to integrate seamlessly into a 19-inch equipment rack, making it exceptionally suited for environments with limited lab or processing space.
Dual-Frequency Operation
- Equipped with two frequencies dedicated to polymerization applications, enabling enhanced control and processing versatility tailored for advanced R&D and manufacturing needs.
Technical Data
- Dimensions: L: 530mm W: 600mm H: 1800mm
- Weight: 95 KG
- Volume: 18 Liter
- Process chamber: aluminium, L: 250mm W: 290mm H:250mm
- Microwave output: 2,45 GHz / 50 - 1200 Watt
- Inclusive: 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
- Substrate holder (optional): aluminium, custom design possible
- Vacuum connection: DN 25 ISO-KF
- Venting: electromagnetic solenoid valve
- Pump system:15-35 m³/h
- Chamber door: hinged-type with viewing port
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