AL 18

The Alpha Plasma System AL 18 is a compact, high-performance plasma processing solution that brings flexibility, precision, and robust engineering to semiconductor packaging and R&D environments. Its modular design, advanced microwave plasma capabilities, and optional enhancements offer customers a tailored toolset to streamline production and achieve uniform results across multiple packaging tasks.

Key Features:

• Cutting-Edge Plasma Technology: Incorporates Alpha Plasma’s proprietary design with microwave coupling, enabling multiple operational modes—including the proven Electron Cyclotron Resonance (ECR)—for exceptional process flexibility.
• Rotary Table Option: Supports classic rotary table configurations for enhanced sample throughput and ease of loading

Technical Data:

• Process chamber: Aluminum
• Volume: 18 liters
• Chamber size: W 250 mm × D 290 mm × H 250 mm
• Chamber door: Hinged – type with viewing port
• Microwave power: 2.45 GHz, adjustable between 50 and 600 Watts
  
  
• Options:
  
  
  • Vacuum pump
  • Gas Channel
  • Rotary table
  • ECR set-up
    
    
• Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
• Dimensions: W 530 mm × D 600 mm × H 550 mm
• Weight: 40 kg w/o pump ; approx . 100 kg w/ vacuum pump