Rapid Thermal Processing

Rapid Thermal Processing (RTP) is a high-precision thermal treatment used in semiconductor, MEMS, and advanced materials fabrication. Unlike conventional furnaces, RTP heats wafers or substrates rapidly to high temperatures for short durations, often just seconds or minutes. This allows precise control over material properties while minimising unwanted diffusion or damage. Typical applications include: Semiconductors – Dopant activation, contact annealing, and oxidation for CMOS, FinFET, and other advanced devices.