scia Multi 680
The scia Multi 680 is engineered for periodic multilayer coatings on curved substrates. Offering superior process performance across multiple 100-layer periods, it enables the deposition of high-precision, homogeneous, or gradient films. With automatic sample loading and a separate load lock, the system ensures extremely short loading times and delivers high throughput for efficient production.
Key features:
- Homogeneous or gradient films on curved substrates by synchronized orbital and spin rotation
- Up to 7 magnetrons, each with separate housing for individual gas supply and defined particle emission profile
- Optional pretreatment with additional ion beam source
- Carrier based handling system with load lock and two independent substrate positions
- Substrate face-down orientation for minimized particle load
Applications:
- Precision optics / large-area optical substrates: The Multi 680 supports very large substrates (up to ~680 mm diameter) which are commonly used in optics, mirrors, beam-line components, synchrotron or X-ray optics.
- Multilayer thin-film coatings: Especially for applications requiring periodic multilayers (e.g., X-ray mirrors, Bragg reflectors, anti-reflective stacks) on large substrates.
- High-end manufacturing for niche/large substrates: Because of the ability to handle large and potentially heavy substrates, this tool is suited for production of large optical components rather than just small wafers.