Mini Lab RIE80

Description:

The Mini Lab RIE80 system from JLS Systems is recognised for its cost effectiveness and adaptability. Its components are mounted within the frame, which minimised the system footprint. The RIE80 possesses a PLC control unit and provides an interface on its operator touch screen. This control system – with features such as data logging and process recipe storage and data logging – can be automatically or manually operated.

There is an ICP upgrade option available, and the system configuration can be tailored to specific processes and customer needs. An Ethernet connection is available for the purpose of system monitoring...

Applications:

Plasma Etching of the following materials:-

  • Dielectric materials (SiO2, SiNx, etc.);

  • Silicon-based materials (Si, a-Si, poly-Si);

  • III-V materials (GaAs, InP, GaN, etc.);

  • Sputtered metals (Au, Pt, Ti, Ta, W, etc.);

  • Diamond-like carbon (DLC);

  • Failure Analysis.

Features:

  • PLC Control System

  • Touch Screen

  • Interface Aluminium

  • Chamber Vacuum

  • Pump Options