Mini Lab MPS2200


The Mini Lab MPS2200 is designed for large area processing in research and development environments. The equipment can be manufactured according to specific customer requirements. Because control equipment is mounted inside the system mainframe, footprint can be kept to a low level.

A modular design permits various electrode configurations, RF sources and vacuum pumping packages to be incorporated into the build of the system.


  • R&D large area deposition or etch processing.


  • Stainless steel chamber;

  • 500mm diameter electrode;

  • Internal chamber volume of 0.25 m3;

  • Substrates up to 450mm in diameter.