AL76/AL76 Compact for Packaging Applications


Aluminium chamber with 76L volume.

The Alpha Plasma System AL 76 / AL76 Compact are perfect all-rounders. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.

The innovative system design and microwave coupling makes the AL 76 the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system configurations.


  • Wire bonding
  • Encapsulation
  • Moulding
  • Flip-Chip underfill
  • Solder ball attach


  • Efficient microwave plasma cleaning
  • Capable of sample sizes up to 300mm
  • 2.45 GHz microwave power adjustable between 50 and 1200 Watts
  • 3 digital mass flow controllers as standard
  • ECR Option
  • Automatic and manual operation