Waltham, Massachusetts

Veeco supply Atomic Layer Deposition tools enabling the ultimate coating precision and uniformity for complex shaped substrates and even today’s sub-10nm device nodes. The Savannah®, Fiji®Phoenix®  and   Firebird™ are designed to deposit pinhole free coatings that are perfectly uniform in thickness, even deep inside pores, trenches and cavities. The ability to deposit such high quality films on substrates with ultra-high aspect ratios is a key feature of these ALD systems. A wide variety of thin films can be deposited using gas, liquid, or solid precursors. 


Products from Veeco