SML Resist


SML is a positive tone organic electron beam resist that has been designed to obtain ultra high aspect ratios of more than 50:1 using high acceleration voltages. It is also 3 times more sensitive than the industry standard electron beam resist called Poly (methylmethacrylate) (PMMA).

The SML electron beam resist provides:

  • Ultra high resolution (sub 10nm)
  • Ultra high aspect ratio (10:1 @30KV & > 50:1 @ 100KV)
  • High metallization yields
  • Reduced processing time for metallization as only one resist is need
  • Reduces writing time as it is a sensitive resist


  • Nanoelectronics
  • Photonics
  • Microfluidics
  • MEMS
  • NEMS
  • Zone
  • Plates
  • Wave guides