EVG®7200
The EVG7200 takes advantage of EVG SmartNIL technology to support mass micro and nanoscale structure manufacturing. It utilises the organisation’s materials expertise in a system which delivers SmartNIL’s soft imprint and stamp capability to smaller geometries and larger substrates. Resolution down to 40 nm* (dependent on template and process) is possible in volume production, allowing the full manufacturing potential of nanoimprint lithography to be realised.
Features
- Volume-proven imprinting technology with superior replication fidelity
- Proprietary SmartNIL® technology with multiple-use polymer stamp technology
- Integrated imprinting, UV curing, demolding, and working stamp fabrication
- Automated cassette-to-cassette handling plus semi-automated R&D mode
- Optional top-side alignment
- Optional mini-environment
- Open platform for all commercially available imprint materials
- Scalability from R&D to production
- System housing for best process stability and reliability
